Hard amorphous carbon film containing ultratrace hydrogen for magnetic recording media and magnetic heads
AssigneeHGST Netherlands B.V.
InventorsToru Matsumura, Hiroshi Inaba, Hiroyuki Matsumoto
Life of this patent
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Abstract
A magnetic recording medium according to one embodiment includes at least a ground layer above a non-magnetic substrate; a magnetic recording layer above the ground layer; and an overcoat above the magnetic recording layer, the overcoat characterized in that said overcoat is an amorphous carbon film having a ratio of sp3 bonding with respect to sp2 bonding (sp3/(sp2+sp3)) of at least 0.5, and hydrogen content in the overcoat in a center layer thereof in a film thickness direction of said overcoat is from 0.1 atom % to 0.6 atom %. Additional products and methods are also presented.
Claims21
A magnetic recording medium, comprising:
- at least a ground layer above a non-magnetic substrate;
- a magnetic recording layer above the ground layer;
- and
- an overcoat above the magnetic recording layer, the overcoat characterized in that
- said overcoat is an amorphous carbon film having a ratio of sp3 bonding with respect to sp2 bonding (sp3 t(sp2+sp3)) of at least 0.5, and hydrogen content in the overcoat in a center layer thereof in a film thickness direction of said overcoat is from 0.1 atom % to 0.6 atom %.
A magnetic head, comprising:
- a playback element;
- and
- an overcoat above a media-facing side of the playback element, the overcoat characterized in that said overcoat is an amorphous carbon film having a ratio of sp3 bonding with respect to sp2 bonding (sp3/(sp2+sp3)) of at least 0.5, and hydrogen content in the film in a center layer in a film thickness direction of said overcoat is from 0.1 atom % to 0.6 atom %.
A method, comprising:
- forming an overcoat above at least one of a magnetic layer of a magnetic medium and a media-facing side of the playback element, the overcoat characterized in that said overcoat is an amorphous carbon film having a ratio of sp3 bonding with respect to sp2 (sp3/(sp2+sp3)) bonding of at least 0.5, and hydrogen content in the film in a center layer in a film thickness direction of said overcoat is in a range of from 0.1 atom % to 0.6 atom %,
- wherein the hydrogen content of said overcoat is adjusted to be in said range by adjusting a flow of hydrogen gas into a film deposition chamber during deposition of the overcoat, and by adjusting a hydrogen gas pressure in said film deposition chamber.
Dependencies are inferred from the claim text.