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US 8,559,091 B2Granted
Thermal control of optical filter with local silicon frame
AssigneeEmcore Corporation
InventorsMarc Finot, Mark McDonald, Andrew Daiber
Life of this patent
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Abstract
A method comprising forming two or more frames from a first wafer, forming two or more etalons from a second wafer, disposing a resistive thermal device on each of the two or more frames, dicing the first wafer and the second wafer, and bonding each of the frames to a corresponding one of the etalons to form optical subassemblies of optical filters.
Claims12
A method, comprising:
- forming two or more frames from a first wafer;
- forming two or more etalons from a second wafer;
- disposing a resistive thermal device on each of the two or more frames;
- dicing the first wafer and the second wafer;
- and
- bonding each of the frames to a corresponding one of the etalons to form optical subassemblies of optical filters.
3 more elements
Dependencies are inferred from the claim text.