High-resolution, common-path interferometric imaging systems and methods
OwnerHwan J. Jeong, David A. Markleinventors
Life of this patent
Estimating the term…
Loading patent…
OwnerHwan J. Jeong, David A. Markleinventors
Estimating the term…
High-resolution, common-path interferometric imaging systems and methods are described, wherein a light source generates and directs light toward a sample from different directions. An optical imaging system collects the resultant scattered and unscattered components. A variable phase shifting system adjusts the relative phase of the components. The interfered components are sensed by an image sensing system. The process is repeated multiple times with different phase shifts to form corresponding multiple electronic signals representative of raw sample images, which are processed by a signal processor to form a processed image. Multiple processed images, each corresponding to a different illumination azimuth angle, are combined to extend the system resolution.
A common path, interferometric imaging system for forming a resolution-enhanced image of a sample, comprising:
A common-path interferometric method of forming a resolution-enhanced image of a sample, comprising:
A method of forming a resolution-enhanced image of a sample, comprising:
Dependencies are inferred from the claim text.