Image calculation method
AssigneeKabushiki Kaisha Toshiba
InventorsMasanori Takahashi, Hiroshi Nomura
Life of this patent
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Abstract
The embodiments relate to a method of calculating an image for simulating by calculation an image imaged by a projection optical system. In this method, a Stokes vector showing a characteristic of an illumination light is acquired first. Next, this Stokes vector is divided into a polarized light component vector and a non-polarized light component vector. The polarized light component vector is divided into a first coherent component vector and a first non-coherent component vector. The non-polarized light component vector is divided into a second coherent component vector and a second non-coherent component vector. Then, imaging calculation is performed at least for the first coherent component vector and the second coherent component vector, respectively.
Claims20
A method of calculating an image for calculating an image to be imaged by a projection optical system, comprising:
- acquiring a Stokes vector showing a characteristic of an illumination light;
- dividing the Stokes vector into a polarized light component vector and a non-polarized light component vector;
- dividing the polarized light component vector into a first coherent component vector and a first non-coherent component vector;
- dividing the non-polarized light component vector into a second coherent component vector and a second non-coherent component vector;
- and
- performing imaging calculation at least for the first coherent component vector and the second coherent component vector, respectively.
A storage medium storing a computer program for performing an imaging calculation method for simulating by calculation an image imaged by a projection optical system,
- the computer program allowing a computer to:
- acquire a Stokes vector showing a characteristic of the illumination light;
- divide the Stokes vector into a polarized light component vector and a non-polarized light component vector;
- divide the polarized light component vector into a first coherent component vector and a first non-coherent component vector;
- divide the non-polarized light component vector into a second coherent component vector and a second non-coherent component vector;
- and
- perform imaging calculation at least for the first coherent component vector and the second coherent component vector, respectively.
A semiconductor exposure apparatus, comprising;
- a light source configured to emit a light;
- a photomask stage enabled to mount a photomask thereon;
- a projection optical system configured to project the light from the light source onto a wafer,
- a photodetector configured to receive a light that passes through the projection optical system;
- an inclination evaluation mask mounted on the photomask stage in place of the photomask;
- an operation device configured to operate a Stokes vector of the light based on a detection signal of the photodetector;
- and
- a simulation device configured to perform an imaging calculation based on the Stokes vector,
- the simulation device being configured to:
- acquire a Stokes vector showing a characteristic of the illumination light;
- divide the Stokes vector into a polarized light component vector and a non-polarized light component vector;
- divide the polarized light component vector into a first coherent component vector and a first non-coherent component vector;
- divide the non-polarized light component vector into a second coherent component vector and a second non-coherent component vector;
- and
- perform imaging calculation at least for the first coherent component vector and the second coherent component vector, respectively.
Dependencies are inferred from the claim text.