Ceramic sensors for wireless sensing

A system for wirelessly sensing at least one physical or environmental parameter, comprising:

• at least one RF resonator for sensing said physical or said environmental parameter comprising:
• a substrate having a substrate surface, and
• a polymer-derived ceramic (PDC) element positioned on or within said substrate surface, wherein said RF resonator has a resonant frequency that changes as a function of said physical or said environmental parameter, and
• a wireless RF reader located remotely from said RF resonator, said wireless RF reader for transmitting a wide-band RF interrogation signal that excites said RF resonator, wherein said wireless RF reader detects a sensing signal retransmitted by said RF resonator and includes a processor for determining said physical or environmental parameter at a location of said RF resonator.

A method of forming an RF resonator for sensing a physical or an environmental parameter, comprising:

• providing a substrate comprising a substrate surface having a polymer-derived ceramic (PDC) precursor within or thereon;
• lithographically defining at least one element comprising said PDC precursor, and
• converting said element into a PDC element,
• wherein said RF resonator has a resonant frequency that changes as a function of said physical or said environmental parameter.