Planar-axial thermistor for bolometry
AssigneeTegam, Inc.
InventorsJefferson D. Lexa, Andrew S. Brush, John D. Swank
Life of this patent
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Abstract
A co-axial microwave bolometer architecture is disclosed that uses thick-film processes to construct very small thermistors on a substrate that is selected for low heat transfer. Thermal isolation is further enhanced by making the planar electrodes from a metal with lower heat transfer than typical electrical metals. Furthermore, a resistor with very strong temperature coefficient (thermistor), is arranged such that connecting metal paths are arranged axially, and as generally flat, thin, planar conductors. Additionally, the substrate of the thermistor is selected to have very low conductivity of heat, so the thermistor element itself is well isolated thermally from its surroundings.
Claims17
A thermistor for use with a high-frequency coplanar waveguide, comprising:
- a substrate;
- and
- at least two electrodes, secured to the substrate;
- wherein the at least two electrodes by-pass each other to create a gap;
- and
- wherein thermistor material is deposited across the gap;
- and
- wherein the thermistor is used as a termination resistance in a microwave power sensor;
- and
- wherein the at least two electrodes have same width as a center conductor of a coplanar waveguide.
A thermistor used as a termination resistance in a microwave power sensor, comprising:
- a substrate;
- and
- at least two electrodes, secured to the substrate;
- wherein the at least two electrodes by-pass each other to create a gap;
- and
- wherein thermistor material is deposited across the gap creating a resistive path between the at least two electrodes;
- and
- wherein the at least two electrodes have same width as a center conductor of a microwave coplanar waveguide.
A thermistor for use in bolometry, comprising:
- a substrate;
- and
- at least two electrodes, secured to the substrate;
- and
- wherein the at least two electrodes have same width as a center conductor of a surface waveguide;
- and
- wherein the thermistor is used as a termination resistance in a microwave power sensor.
Dependencies are inferred from the claim text.