Method to test the measurement accuracy of at least one magnetic field sensor using a semiconductor chip having a measurement coil

A method to test a measurement accuracy of at least one magnetic field sensor having a semiconductor wafer with at least one first semiconductor chip and at least one second semiconductor chip, wherein a measurement coil is integrated into the at least one first semiconductor chip, and a magnetic field-sensitive electric circuit is integrated into the at least one second semiconductor chip to form a magnetic field sensor, the method comprising:

• positioning the at least one first semiconductor chip at an exciter coil,
• applying current to the exciter coil in order to generate a first reference magnetic field having a magnetic flux density,
• acquiring, with the aid of the measurement coil, a first measured value that is dependent on the magnetic flux density,
• providing, depending on the first measured value, a reference value range,
• positioning the at least one second semiconductor chip at the exciter coil,
• acquiring a second measured value that is dependent on the magnetic flux density with the aid of the electric circuit, and
• comparing the second measured value with the reference value range.

A method for testing a measurement accuracy of a magnetic field sensor, comprising:

• a) providing a semiconductor wafer having at least one first semiconductor chip and at least one second semiconductor chip, the at least one first semiconductor chip having an integrated measurement coil, and the at least one second semiconductor chip having an integrated magnetic field-sensitive electric circuit, said electric circuit forming the magnetic field sensor;
• b) positioning one of said at least one first semiconductor chip at an exciter coil, and supplying said exciter coil with a current to generate a reference magnetic field having a magnetic flux density at said measurement coil of said at least one first semiconductor chip, and acquiring a first measured value that is dependent on said magnetic flux density at said measurement coil;
• c) adjusting the current supplied to said exciter coil based on said first measured value to form an adjusted magnetic flux density;
• d) positioning the at least one second semiconductor chip at said exciter coil and using the adjusted magnetic flux density at the electric circuit of said at least one second semiconductor chip, and acquiring a second measured value that is dependent on said adjusted magnetic flux density at said electric circuit;
• and
• e) comparing said second measured value with a reference value range.

A method for testing a measurement accuracy of a magnetic field sensor, comprising:

• a) providing a semiconductor wafer having at least one first semiconductor chip and at least one second semiconductor chip, the at least one first semiconductor chip having an integrated measurement coil, and the at least one second semiconductor chip having an integrated magnetic field-sensitive electric circuit, said electric circuit forming the magnetic field sensor;
• b) positioning one of said at least one first semiconductor chip at an exciter coil, and supplying said exciter coil with a current to generate a reference magnetic field having a magnetic flux density at said measurement coil of said at least one first semiconductor chip, and acquiring a first measured value that is dependent on said magnetic flux density at said measurement coil;
• c) providing a reference value range based on said first measured value;
• d) positioning the at least one second semiconductor chip at said exciter coil to form a magnetic flux density at said electric circuit of said at least one second semiconductor chip, and acquiring a second measured value that is dependent on said magnetic flux density at said electric circuit;
• and
• e) comparing said second measured value with said reference value range.