Plasma processing apparatus

A plasma processing apparatus comprising:

• a vacuum chamber that forms a processing chamber in which an object to be processed is accommodated;
• a plasma processing execution portion that introduces plasma generating gas into the processing chamber under a reduced pressure state in the processing chamber, excites the plasma generating gas by applying a high frequency voltage, and executes plasma processing for the object to be processed accommodated in the processing chamber;
• and
• a discharge state detecting unit that detects an abnormal discharge in the processing chamber,
• wherein the plasma processing apparatus comprises:
• a window portion that is formed at the vacuum chamber;
• a camera that takes images of an inside of the vacuum chamber through the window portion and outputs moving image data;
• a first storing portion that stores the moving image data output from the camera;
• a second storing portion that stores moving image data extracted from the first storing portion;
• and
• an image data extracting unit that extracts at least moving image data, which show the generation state of the abnormal discharge, from the first storing portion and stores the extracted moving image data in the second storing portion when the discharge state detecting unit detects the abnormal discharge.