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US 8,558,354 B2Granted
Semiconductor device and method for manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorsYoko Iwakaji, Jun Hirota, Moto Yabuki, Wakana Kai, Hirokazu Ishida, Ichiro Mizushima
Life of this patent
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Abstract
According to one embodiment, a semiconductor device includes a plurality of silicon films. The plurality of silicon films are disposed on one plane and are made of polysilicon containing an impurity. A crystal orientation of each of the silicon films is a (311) orientation.
Claims5
A semiconductor device comprising a plurality of silicon films disposed on one plane and made of polysilicon containing an impurity,
- a crystal orientation of each of the silicon films is a (311) orientation,
- the device further comprising:
- a first interconnect layer formed of a plurality of first interconnects extending in a first direction parallel to a top surface of the silicon films;
- and
- a second interconnect layer formed of a plurality of second interconnects extending in a second direction intersecting the first direction,
- the first interconnect layer and the second interconnect layer being stacked alternately, and
- each of the silicon films being disposed between each of the first interconnects and each of the second interconnects.
4 more elements
A semiconductor device comprising a plurality of silicon films disposed on one plane and made of polysilicon containing an impurity,
- a crystal orientation of each of the silicon films is a (311) orientation,
- further comprising a memory film stacked on each of the silicon films.
Dependencies are inferred from the claim text.