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US 8,558,350 B2Granted
Metal-oxide-metal capacitor structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJiun-Jie Huang, Ling-Sung Wang, Chi-Yen Lin
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Abstract
A metal-oxide-metal capacitor comprises a first electrode, a second electrode, a plurality of first fingers and a plurality of second fingers. Each first finger and its corresponding second finger are in parallel and separated by a low k dielectric material. A guard ring is employed to enclose the metal-oxide-metal capacitor so as to prevent moisture from penetrating into the low k dielectric material.
Claims20
A structure comprising:
- a metal-oxide-metal capacitor comprising a low k dielectric insulation layer;
- and
- a guard ring enclosing the metal-oxide-metal capacitor, wherein the guard ring is configured to prevent moisture from penetrating into the low k dielectric insulation layer.
A multilayer structure comprising:
- a first metal-oxide-metal layer comprising
- a first finger coupled to a first electrode;
- a second finger coupled to a second electrode, wherein the first finger and the second finger are in parallel;
- a first conductive member enclosing the first finger, the second finger, the first electrode and the second electrode;
- a second metal-oxide-metal layer comprising
- a third finger coupled to a third electrode;
- a fourth finger coupled to a fourth electrode, wherein the third finger and the fourth finger are in parallel;
- a second conductive member enclosing the third finger, the fourth finger, the third electrode and the fourth electrode;
- and
- a dielectric layer comprising:
- a first via plug coupled between the first electrode and the third electrode;
- a second via plug coupled between the second electrode and the fourth electrode;
- and
- a plurality of via plugs coupled between the first conductive member and the second conductive member.
11 more elements
A capacitor comprising:
- a first electrode coupled to a plurality of first conductive fingers, wherein
- the first conductive fingers are parallel to each other;
- a second electrode coupled to a plurality of second conductive fingers, wherein
- the second conductive fingers are parallel to each other;
- and
- a first conductive member enclosing the first conductive fingers, the second conductive fingers, the first electrode and the second electrode.
3 more elements
Dependencies are inferred from the claim text.