A1 alloy film, electronic device, and active matrix substrate for use in electrooptic display device
AssigneeMitsubishi Electric Corporation
InventorsKazunori Inoue, Nobuaki Ishiga, Kensuke Nagayama, Naoki Tsumura, Takumi Nakahata
Life of this patent
Estimating the term…
Abstract
In accordance with one aspect of the present invention, an Al alloy film contains a first additive element composed of Ni, and at least one type of second additive element selected from the group consisting of Group 2A alkaline earth metals and Groups 3B and 4B metalloids in Period 2 or 3 of the periodic table of the elements. Furthermore, the composition ratio of the first additive element is 0.5-5 at %, and the composition ratio of the second additive element is 0.1-3 at %.
Claims20
An electronic device comprising:
- an Al alloy film including a first additive element comprising Ni, and at least one second additive element selected from the group consisting of B, Mg and Si;
- and
- a Si film or a film containing Si as the main ingredient that is directly contacted with the Al alloy film,
- wherein C is excluded from the Al alloy film.
An active matrix substrate for use in an electrooptic display device comprising:
- an Al alloy film including a first additive element comprising Ni, and at least one second additive element selected from the group consisting of B, Mg and Si;
- and
- a semiconductor layer including Si or a film containing Si as the main ingredient that is directly contacted with the Al alloy film, and/or an oxide conducting film containing oxide as the main ingredient that is directly contacted with the Al alloy film,
- wherein C is excluded from the Al alloy film.
An electronic device comprising:
- an Al alloy film including a first additive element comprising Ni, and at least one second additive element selected from the group consisting of B, Mg and Si;
- and
- an oxide conducting film containing oxide as the main ingredient that is directly contacted with the Al alloy film,
- wherein C is excluded from the Al alloy film.
Dependencies are inferred from the claim text.