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US 8,558,192 B2Granted
Gas delivery system with voltage gradient for an ion microscope
AssigneeCarl Zeiss Microscopy GmbH
InventorsBilly W. Ward, John Notte, IV, Randall G. Percival
Life of this patent
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Abstract
Disclosed are systems and methods for applying a voltage gradient to a gas delivery system, delivering a gas through a length of the gas delivery system having the voltage gradient, the gas having a pressure-distance product of less than about 1×10−2 Torr-inches or greater than about 100 Torr-inches, and delivering the gas into a housing of an ion microscope, the housing including an emitter and an extractor.
Claims22
A method, comprising:
- applying a voltage gradient to a gas delivery system;
- delivering a gas through a length of the gas delivery system having the voltage gradient, the gas having a pressure-distance product of less than about 1×10−2 Torr-inches;
- and
- then delivering the gas into a housing of an ion microscope, the housing including an emitter and an extractor,
- wherein the gas pressure in the length of the gas delivery system having the voltage gradient is less than about 1×10−2 Torr.
2 more elements
A system, comprising:
- an ion microscope having a housing containing an emitter, an extractor and a suppressor, at least one of the emitter, extractor and suppressor having an orifice;
- and
- a gas delivery system configured to provide a path for gas flow between a gas supply and the orifice, the gas delivery system including a device configured to apply a voltage gradient across a portion of the gas delivery system,
- wherein the device is at a location of the gas delivery system configured to maintain the gas at a pressure of less than about 1×10−2 Torr.
1 more element
Dependencies are inferred from the claim text.