Method for manufacturing solid-state thermal neutron detectors with simultaneous high thermal neutron detection efficiency (>50%) and neutron to gamma discrimination (>1.0E4)

A method, comprising:

• providing a structure including a p+ region on a first side of an intrinsic region and an n+ region on a second side of said intrinsic region, wherein the thickness of said intrinsic region comprises a thickness selected to achieve a desired neutron to gamma discrimination;
• removing material from (i) one of said p+ region or said n+ region and (ii) said intrinsic region to produce pillars with open space between each pillar of said pillars, wherein said pillars have a pitch within a range from about 0.1 μm to about 10 μm and a height within a range from about 10 μm to about 200 μm;
• filling said open space with a neutron sensitive material comprising 10B;
• forming a first electrode in contact with said pillars;
• and
• forming a second electrode in contact with the one of said first side or said second side that is on a side opposite of said intrinsic layer with respect to said first electrode.