Stack-type semiconductor device and method for manufacturing the same

A method for manufacturing a stack-type semiconductor device, comprising the steps of:

• a) providing wafer assemblies each having an interconnect wafer and an active wafer, wherein the interconnect wafer comprises a glass substrate and an interconnect part on the glass substrate, the interconnect part having conductive through vias therein, and the active wafer comprises a semiconductor substrate and an active part on the semiconductor substrate, the active part having conductive through vias therein;
• b) removing the semiconductor substrate in a first wafer assembly to form a first surface;
• c) removing the glass substrate in a second wafer assembly to form a second surface;
• d) bonding the first wafer assembly and the second wafer assembly together by a direct wafer bonding process with the first surface and the second surface contacting each other so that the conductive through vias in the active part of the first wafer assembly are in direct electrical contact with the conductive through vias in the interconnect part of the second wafer assembly;
• e) removing the semiconductor substrate in the second wafer assembly;
• f) repeating the steps c)-e) so that a plurality of levels of wafer assemblies are stacked;
• g) repeating the steps c)-d) so that a lowermost wafer assembly is stacked;
• h) removing the glass substrate in an uppermost wafer assembly.