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US 8,557,507 B2Granted
Fabrication of nano-twinned nanopillars
AssigneeCalifornia Institute of Technology
InventorsDongchan Jang, Julia R. Greer
Life of this patent
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Abstract
Nanopillars with nanoscale diameters are provided where the nanopillar has uniformly aligned nano-twins either perpendicular or inclined by 1-90° to the pillar-axis with no grain-boundaries or any other features.
Claims8
A method of making a nano-twinned nanopillar composition comprising:
- (a) coating a substrate with a conductive layer;
- (b) coating the conductive layer with a resist polymer;
- (c) using a lithography technique to pattern a template into the resist polymer, wherein the template serves as a template-cathode;
- (d) providing an anode;
- (e) providing a non-patterned cathode wherein the total surface area of the template-cathode and non-patterned cathode is substantially equal to the surface area of the anode;
- (f) electrodepositing a metal into the template;
- and
- (g) optionally removing the resist.
5 more elements
Dependencies are inferred from the claim text.