Reaction apparatus for producing trichlorosilane and method for producing trichlorosilane
AssigneeMitsubishi Materials Corporation
InventorChikara Inaba
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Abstract
A reaction apparatus for producing trichlorosilane in which metal silicon powder M is reacted with hydrogen chloride gas, thus generating trichlorosilane, includes: an apparatus body into which the metal silicon powder is supplied; and an ejection port for ejecting the hydrogen chloride gas into the apparatus body from the bottom part of the apparatus body, wherein a plurality of holed pieces having a through hole penetrating in the thickness direction and a plurality of pellets interposed between these holed pieces are stacked in a mixed state on the upper side of the ejection port.
Claims2
A method for producing trichlorosilane by reacting metal silicon powder with hydrogen chloride gas, thereby generating trichlorosilane, the method comprising:
- stacking a plurality of plate-shaped holed pieces having through holes penetrating in the thickness direction and a plurality of ball members interposed between the plate-shaped holed pieces in a mixed state on the upper side of a partition plate partitioning the bottom part of an apparatus body into which the metal silicon powder is supplied;
- and
- ejecting the hydrogen chloride gas from an ejection port, which is opened on the upper face of the partition plate, while supplying the metal silicon powder into the apparatus body,
- wherein the ball members and the plate-shaped holed pieces are mixed so as to give a mixture ratio of W1/W2=0.5 to 5 where a weight of the ball members is expressed as W1 and a weight of the plate-shaped holed pieces is expressed as W2.
Dependencies are inferred from the claim text.