Method and device for plasma-supported surface treatment

Abstract

A method and a series of devices for dry cleaning, activating, modifying, coating, and biologically decontaminating (degerming, disinfecting, sterilizing) surfaces by means of an atmospheric pressure plasma generated using a surface barrier discharge are provided. The invention is used for dry cleaning, activating, coating, modifying, and biologically contaminating surfaces by means of an atmospheric pressure plasma generated in a defined, flowing gas atmosphere by a surface barrier discharge, comprising a high-voltage electrode that is covered with a dielectric or ferroelectric material, an electrically conducting grounded contact electrode, a high-voltage supply, a gas supply, and a gas nozzle (encompassing a gas outlet); said gas nozzle is located in the direct vicinity of the grounded contact electrode, is integrated into the contact electrode, or acts as the grounded contact electrode.

Dependencies are inferred from the claim text.