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US 8,556,594 B2Granted
Vacuum ejector and vacuum apparatus having the same
AssigneeSamsung Electronics Co., Ltd.
InventorsHyun-Wook Kim, Yong-Wook Kim, Tea-Jin Park
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AssigneeSamsung Electronics Co., Ltd.
InventorsHyun-Wook Kim, Yong-Wook Kim, Tea-Jin Park
Estimating the term…
A vacuum pump ejector may include ejector body and a nozzle. The ejector body may have a passageway through which fluids may flow. The passageway may have an orifice. The nozzle may inject a purging gas to the orifice. The ejector may decrease a pressure between the vacuum pump and the scrubber, so that the vacuum pump may have improved efficiency. Thus, the vacuum pump may be effectively operated.
An evacuator apparatus comprising:
An exhaust assembly for a semiconductor or LCD manufacturing process comprising:
A vacuum apparatus, comprising:
Dependencies are inferred from the claim text.
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About 4 years 11 months of term left · ends 28 Sep 2031 (estimated)
This application claims priority under 35 USC §119 to Korean Patent Application No. 2010-0024208, filed on Mar. 18, 2010 in the Korean Intellectual Property Office (KIPO), the contents of which are herein incorporated by reference in their entirety.
1. Field
Example embodiments of the inventive concept relate to a vacuum ejector and a vacuum pump in conjunction with a vacuum ejector. More particularly, example embodiments of the inventive concept relate to a vacuum ejector used in connection with manufacturing a semiconductor device or a liquid crystal display (LCD) device, and a vacuum pump working in conjunction with the vacuum ejector.
FIG. 1 is a block diagram illustrating a conventional vacuum apparatus;
FIG. 2 is a cross-sectional view illustrating a vacuum ejector in accordance with some example embodiments of the inventive concept;
FIG. 3 is a block diagram illustrating a vacuum apparatus including the ejector of FIG. 2;
Various example embodiments of the inventive concept will be described more fully hereinafter with reference to the accompanying drawings, in which some example embodiments of the inventive concept are shown. The present invention may, however, be embodied in many different forms and should not be construed as limited to the example embodiments of the inventive concept set forth herein. Rather, these example embodiments of the inventive concept are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the present invention to those skilled in the art.
It will be understood that when an element is referred to as being “on,” “connected to” or “coupled to” another element or layer, it can be directly on, connected or coupled to the other element or intervening elements or layers may be present. In contrast, when an element is referred to as being “directly on,” “directly connected to” or “directly coupled to” another element, there are no intervening elements or layers present. Like numerals refer to like elements throughout. As used herein, the term “and/or” includes any and all combinations of one or more of the associated listed items.
It will be understood that, although the terms first, second, third etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. Thus, a first element discussed below could be termed a second element without departing from the teachings of the present invention.