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US 8,556,566 B1Granted
Disk stacking method and apparatus
AssigneeWD Media, LLC
InventorsShoji Suzuki, David A. Throckmorton
Life of this patent
Estimating the term…
Abstract
Aspects of embodiments of the present invention are directed toward a method of stacking disk-shaped substrates for polishing without using a centering shaft and an apparatus for implementing the method. A stack of disk-shaped substrates can be concentrically aligned without contacting the inside circumferential surfaces of the disk-shaped substrates by applying pressure to the outside edges of the disk-shaped substrates in different lateral directions.
Claims30
A method for stacking and aligning disk-shaped substrates, the method comprising:
- stacking a plurality of disk-shaped substrates having about the same outside diameter to form a stack, each of the disk-shaped substrates having a hole at a center portion thereof;
- and
- applying, using at least two alignment members, pressure to outside edges of two or more of the disk-shaped substrates in at least one lateral direction of the stack to concentrically align the holes of the disk-shaped substrates,
- wherein one of the at least two alignment members comprises a concave surface configured to receive a portion of each of the disk-shaped substrates.
1 more element
An apparatus for stacking and aligning disk-shaped substrates, comprising:
- a first edge guide configured to apply pressure to outside edges of two or more of disk-shaped substrates arranged in a stack in a first lateral direction of the stack, the two or more disk-shaped substrates each having a hole at a center portion thereof;
- and
- a second edge guide configured to apply pressure to the outside edges of the two or more disk-shaped substrates in a second lateral direction of the stack,
- wherein the first edge guide is configured to be movable toward the second edge guide to apply pressure to the outside edges of the disk-shaped substrates from at least three lateral sides of the stack to concentrically align the holes of the disk-shaped substrates, and
- wherein one of the first edge guide and the second edge guide comprises a concave surface configured to receive a portion of each of the disk-shaped substrates.
2 more elements
Dependencies are inferred from the claim text.