Liquid ejecting head and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorFujio Akahane
Life of this patent
Estimating the term…
Abstract
A liquid ejecting head includes: a flow channel formation member configured of silicon; a nozzle plate configured of silicon; a manifold member that, along with the flow channel formation members, defines a manifold that communicates with a plurality of pressure generation chambers; and a cover member that is affixed to the manifold member and to the surface of the flow channel formation member that is affixed to the nozzle plate and that seals the manifold. Here, the cover member is formed of a different material from the nozzle plate and is anchored at a distance from the nozzle plate.
Claims6
A liquid ejecting head comprising:
- a flow channel formation member, configured of silicon, that includes a plurality of pressure generation chambers that communicate with corresponding nozzles that eject a liquid;
- a nozzle plate, configured of silicon, that is affixed to the flow channel formation member and in which the nozzles are formed;
- a manifold member that is anchored to the flow channel formation member on the opposite side to the nozzle plate and that, along with the flow channel formation member, defines part of a manifold that communicates with the plurality of pressure generation chambers;
- and
- a cover member that is affixed to the manifold member and to the surface of the flow channel formation member that is affixed to the nozzle plate and that seals the manifold,
- wherein the cover member is formed of a different material from the nozzle plate and is anchored at a distance from the nozzle plate.
Dependencies are inferred from the claim text.