Temperature-compensated piezoelectric flexural transducer

Abstract

It is introduced a miniaturizable actuation device based on piezoelectric flexural transducer element, which can be fabricated easily and cost effective, for use in a fluid valve or other devices, the actuation device being suited to perform reproducible actuation deflections fast and precisely, uneffected by disturbing influences due to temperature changes and mechanical deformations of the housing. The actuation device according to the invention includes a fluid bearing 5 with a first surface 7, which is associated with the flexural transducer element 2, a second surface 8, which is associated with the housing 15, and a flowable power transmitting fluid 6 between the surfaces, to transmit the reaction forces and—moments resulting from the actuatro deflection from the flexural transducer element 2 to the housing 15.

Dependencies are inferred from the claim text.