Method for constant concentration evaporation and a device using the same

A method comprising:

• heating or cooling a precursor in a heat exchanger;
• discharging the precursor from the heat exchanger to an evaporator;
• the evaporator comprising:
• an outer casing;
• and
• an inner casing that is disposed within the outer casing;
• the inner casing contacting a plate;
• wherein the inner casing encloses:
• a first conduit;
• wherein the first conduit is an inverted U-shaped conduit that has one end in fluid communication with a first port for introducing a carrier fluid into the evaporator and an opposing end in fluid communication with a sparger;
• and
• a second conduit;
• wherein the second conduit is an inverted J-shaped conduit that has one end in fluid communication with a second port for removing the carrier fluid entrained with a precursor from the evaporator and an opposing end in fluid communication with a splash shield;
• introducing a carrier fluid into the evaporator via the first conduit;
• sparging the precursor with the carrier fluid;
• and
• removing the carrier fluid entrained with the precursor from the evaporator via the second conduit;
• where the proximity of the heat exchanger to the evaporator is effective to maintain the precursor in the evaporator at a substantially constant temperature when the ambient temperature around the heat exchanger and the evaporator fluctuates by an amount of up to about ±35° C.

A method for manufacturing a device comprising:

• disposing an inverted U-shaped conduit in a first hole, an inverted J-shaped conduit in a second hole and a first precursor conduit in a third hole on a plate;
• the plate being affixed with a heat exchanger;
• and
• disposing an inner casing and an outer casing on a side of the plate that is opposed to a side where the heat exchanger contacts the plate;
• the inner casing being contained in the outer casing;
• the inner casing enclosing the inverted U-shaped conduit, the inverted J-shaped conduit and the first precursor conduit.

A device comprising:

• an evaporator;
• and
• a heat exchanger;
• the heat exchanger being in fluid communication with the evaporator;
• the evaporator comprising:
• an outer casing;
• and
• an inner casing that is disposed within the outer casing;
• the inner casing contacting a plate;
• wherein the inner casing encloses:
• a first conduit that is operative to introduce a carrier fluid into the evaporator;
• and
• a second conduit that is operative to remove the carrier fluid entrained with a precursor;
• wherein the outer casing is detachably attached to the plate;
• the plate contacting a first precursor conduit that is operative to introduce the precursor into the evaporator from the heat exchanger;
• where the heat exchanger is disposed proximate to the evaporator at a distance effective to maintain the precursor in the evaporator at a substantially constant temperature when the ambient temperature around the heat exchanger and the evaporator fluctuates by an amount of up to about ±35° C.;
• wherein the second conduit is an inverted J-shaped conduit that has one end in fluid communication with a second port for removing the carrier fluid entrained with a precursor from the evaporator and an opposing end in fluid communication with a splash shield.