Substrate processing apparatus
AssigneeHitachi Kokusai Electric Inc.
InventorsTetsuo Yamamoto, Tadashi Kontani
Life of this patent
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Abstract
Disclosed is a substrate processing apparatus, including: a processing chamber to accommodate a plurality of substrates therein in such a way that the substrate are vertically stacked; a gas supply system to supply processing gas into the processing chamber; an exhaust system to exhaust an atmosphere from the processing chamber; at least a pair of electrodes made of flexible member extending in a stacking direction of the substrates to activate the processing gas; and protecting tubes to accommodate the electrodes therein, wherein each of the protecting tubes is provided with a bent portion at a higher position than an uppermost substrate, and a tip end of each of the electrodes is located on a tip end side of each of the protecting tubes over the bent portion.
Claims16
A substrate processing apparatus, comprising:
- a processing chamber to accommodate a plurality of substrates therein in such a way that the substrate are vertically stacked;
- a gas supply system to supply processing gas into the processing chamber;
- an exhaust system to exhaust an atmosphere from the processing chamber;
- at least a pair of electrodes made of flexible member extending in a stacking direction of the substrates to activate the processing gas;
- and
- protecting tubes to accommodate the electrodes therein, wherein
- each of the protecting tubes is provided with a bent portion at a higher position than an uppermost substrate, and a tip end of each of the electrodes is located on a tip end side of each of the protecting tubes over the bent portion.
A substrate processing apparatus, comprising:
- a processing tube;
- a support section to support a plurality of substrates in such a way that the substrate are vertically stacked in the processing tube;
- a gas supply system to supply processing gas into the processing tube;
- an exhaust system to exhaust an atmosphere from the processing tube;
- at least a pair of electrodes made of flexible member extending in a stacking direction of the substrates;
- and
- protecting tubes disposed inside the processing tube to accommodate the electrodes therein, wherein
- each of the protecting tubes is provided with a bent portion at a higher position than an uppermost substrate supported by the support section, and a tip end of each of the electrodes extends to a tip end side of each of the protecting tubes along the bent portion.
Dependencies are inferred from the claim text.