MEMS device with enhanced resistance to stiction

A microelectromechanical systems (MEMS) device comprising:

• a substrate;
• a movable element suspended above said substrate and adapted for motion relative to said substrate about a rotational axis interposed between first and second ends of said movable element, said movable element including a first section between said rotational axis and said first end and a second section between said rotational axis and said second end;
• and
• a secondary structure extending from said second end of said movable element and suspended above said substrate, said secondary structure including a secondary mass and a spring element, said secondary mass having a side edge oriented approximately parallel to said second end of said movable element, said spring element being interconnected between said second end of said movable element and said side edge of said secondary mass, and said spring element exhibits a stiffness, wherein:
• said stiffness of said spring element enables movement of said secondary mass counter to said movable element when said movable element is subjected to a force that is greater than a sensing range of said MEMS device;
• and
• said stiffness of said spring element substantially prevents said movement of said secondary mass counter to said movable element when said movable element is subjected to a force within said sensing range of said MEMS device.

A microelectromechanical systems (MEMS) device comprising:

• a substrate;
• a movable element suspended above said substrate, said movable element being adapted for motion about a rotational axis interposed between first and second ends of said movable element, said movable element including a first section between said rotational axis and said first end and a second section between said rotational axis and said second end;
• and
• a secondary structure extending from said second end of said movable element and suspended above said substrate, said secondary structure including a secondary mass and a spring element, said secondary mass having a side edge oriented approximately parallel to said second end of said movable element, said spring element being interconnected between said second end of said movable element and said side edge of said secondary mass, said spring element enabling movement of said secondary mass counter to said motion of said movable element when said movable element is subjected to a force that is greater than a sensing range of said MEMS device.