MEMS sensor with folded torsion springs

A device comprising:

• a microelectromechanical systems (MEMS) sensor, said MEMS sensor comprising:
• a substrate;
• a movable element positioned in spaced apart relationship above a surface of said substrate, said movable element being adapted for motion relative to a rotational axis positioned between first and second ends of said movable element;
• a suspension anchor formed on said surface of said substrate, said suspension anchor having a centroid located at said rotational axis;
• a first folded torsion spring interconnecting said movable element with said suspension anchor, said first folded torsion spring having a first end coupled to said suspension anchor;
• and
• a second folded torsion spring interconnecting said movable element with said suspension anchor, said second folded torsion spring having a second end coupled to said suspension anchor, said first and second folded torsion springs having a substantially equivalent shape, said second folded torsion spring being generally oriented in rotational symmetry relative to said first folded torsion spring about said centroid of said suspension anchor, each of said first and second ends of said first and second folded torsion springs being displaced away from and on opposite sides of said rotational axis by a substantially equivalent distance, and each of said first and second folded torsion springs includes multiple segments aligned substantially parallel to said rotational axis, said segments being linked together in serpentine fashion by bar elements.

A microelectromechanical (MEMS) sensor comprising:

• a substrate;
• a movable element positioned in spaced apart relationship above a surface of said substrate, said movable element including an opening extending through said movable element, said opening being delineated by an inner edge portion of said movable element, and said movable element is adapted for motion relative to a rotational axis positioned between first and second ends of said movable element;
• a suspension anchor formed on said surface of said substrate and centered in said opening;
• a first folded torsion spring interconnecting said movable element with said suspension anchor and arranged generally parallel to said rotational axis, said first folded torsion spring having a first end coupled to a first side of said suspension anchor and a second end coupled to said inner edge portion of said movable element;
• and
• a second folded torsion spring interconnecting said movable element with said suspension anchor and arranged generally parallel to said rotational axis, said second folded torsion spring having a third end coupled to a second side of said suspension anchor opposite said first side and a fourth end coupled to said inner edge portion of said movable element, said first and second folded torsion springs having a substantially equivalent shape, said second folded torsion spring being generally oriented in rotational symmetry relative to said first folded torsion spring about a centroid of said suspension anchor, and each of said first and third ends of said first and second folded torsion springs is displaced away from and on opposite sides of said rotational axis by a substantially equivalent distance.