Piezoelectric transducers
AssigneeAnalog Devices, Inc.
InventorsJinbo Kuang, William A. Clark, John A. Geen
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Abstract
An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.
Claims8
A piezoelectric transducer comprising:
- a structure made of piezoelectric material, the structure including:
- a set of substantially flat concentric frames having a common top surface and a common bottom surface and characterized by a direction of elongation, the top and the bottom surfaces being substantially parallel to a reference plane, and
- bridges connecting the frames, the bridges disposed symmetrically about a plane of symmetry of the structure so as to allow the frames to deform in the reference plane;
- and
- a set of at least two top electrodes disposed on the top surface of the frames;
- and
- a set of at least two bottom electrodes disposed on the bottom surface of the frames, the sets of top and bottom electrodes being substantially equivalent and positioned opposite to each other, each of corresponding top and bottom electrodes disposed on at least two frames along a path that is symmetric about the plane of symmetry and crosses some of the bridges,
- wherein the transducer transduces energy, through piezoelectric effect, between electrostatic energy associated with voltage differential between corresponding top and bottom electrodes and mechanical energy associated with deformation of the frames.
Dependencies are inferred from the claim text.