Method of manufacturing a vibrating element
AssigneeNikon Corporation
InventorTakahiro Sato
Life of this patent
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Abstract
A vibrating element manufacturing method by which adhesion is stabilized and yield is improved, a vibrating element, a vibrating actuator, a lens barrel and a camera system. A vibrating element manufacturing method is provided with a first step of arranging an elastic body on a holding member, a second step of forming an electromechanical transducing element by injection molding on the surface of the elastic body, and a third step of sintering the electromechanical transducing element by heating and bonding the elastic body with the electromechanical transducer element.
Claims10
A vibrating element manufacturing method comprising:
- a first step of disposing an electro-mechanical conversion element in a retaining member;
- a second step of forming a elastic body at a surface of the electro-mechanical conversion element by injection molding;
- a third step of heating and sintering the elastic body such that the elastic body is bonded with the electro-mechanical conversion element as a result of the heating and sintering;
- and
- a fourth step of forming an electrode at the electro-mechanical conversion element.
A vibrating element manufacturing method comprising:
- a first step of disposing an electro-mechanical conversion element in a first die;
- a second step of disposing a second die at the first die;
- a third step of injecting a powder material into the second die and forming a elastic body at a surface of the electro-mechanical conversion element;
- a fourth step of removing the elastic body and the electro-mechanical conversion element from the first die and the second die, and heating and sintering the elastic body such that the elastic body is bonded with the electro-mechanical conversion element as a result of the heating and sintering;
- and
- a fifth step of forming an electrode at the electro-mechanical conversion element.
A vibrating element manufacturing method of manufacturing a vibrating element provided with a elastic body and an electro-mechanical conversion element, which comprises:
- a retention step of integrating and retaining the elastic body and the electro-mechanical conversion element;
- a thermal sintering step of heating and sintering the elastic body and the electro-mechanical conversion element retained by the retention step such that the elastic body is bonded with the electro-mechanical conversion element as a result of the heating and sintering;
- and
- an electrode formation step of forming an electrode at the electro-mechanical conversion element.
A vibrating element manufacturing method of manufacturing a vibrating element provided with a elastic body and an electro-mechanical conversion element, the vibrating element manufacturing method comprising:
- a retention step of integrating and retaining the elastic body and the electro-mechanical conversion element;
- a thermal sintering step of heating and sintering the elastic body and the electro-mechanical conversion element retained by the retention step such that the elastic body is bonded with the electro-mechanical conversion element as a result of the heating and sintering;
- and
- a polarization step of polarizing the electro-mechanical conversion element.
A vibrating element manufacturing method comprising:
- a first step of disposing an electro-mechanical conversion element in a retaining member;
- a second step of forming a elastic body at a surface of the electro-mechanical conversion element by injection molding;
- a third step of heating and sintering the elastic body such that the elastic body is bonded with the electro-mechanical conversion element as a result of the heating and sintering;
- and
- a fourth step of polarizing the electro-mechanical conversion element.
A vibrating element manufacturing method comprising:
- a first step of disposing an electro-mechanical conversion element in a first die;
- a second step of disposing a second die at the first die;
- a third step of injecting a powder material into the second die and forming a elastic body at a surface of the electro-mechanical conversion element;
- a fourth step of removing the elastic body and the electro-mechanical conversion element from the first die and the second die, and heating and sintering the elastic body such that the elastic body is bonded with the electro-mechanical conversion element as a result of the heating and sintering;
- and
- a fifth step of polarizing the electro-mechanical conversion element.
Dependencies are inferred from the claim text.