Combinatorial process optimization methodology and system
AssigneeIntermolecular, Inc.
InventorPrashant B. Phatak
Life of this patent
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Abstract
A method for obtaining an optimized process solution from a set of design of experiments in a cost effective manner is provided. An actual experiment is performed and data from the experiments is obtained. Through statistical analysis of the data, coefficients are obtained. These coefficients are input into an experiment simulator where input parameters and conditions are combined with the coefficients to predict an output for the input parameters and conditions. From simulated results, conclusions can be drawn as to sets of input parameters and conditions providing desired results. Thereafter, physical experiments utilizing the input parameters and conditions may be performed to verify the simulated results.
Claims10
A method for designing experiments for unit processes for semiconductor substrate manufacturing, the method comprising:
- utilizing a combinatorial processing tool to process multiple site-isolated regions on a first substrate with a unit process of a semiconductor manufacturing operation by varying one of the process parameters of the unit process in a combinatorial manner, thereby defining a combinatorial array of site-isolated regions on the first substrate wherein the semiconductor manufacturing operation is one of a wet chemical operation, a dry processing operation, or a deposition operation;
- and
- after evaluating the multiple site-isolated regions of the combinatorial array, predicting results for varied processing parameter sets and selecting a subset of the varied processing parameter sets having desired results;
- and
- utilizing the combinatorial processing tool to process multiple site-isolated regions on a second substrate combinatorially according to the subset of the varied processing parameter sets.
Dependencies are inferred from the claim text.