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AssigneeHamamatsu Photonics K.K.
InventorsTaro Ando, Yoshiyuki Ohtake, Naoya Matsumoto, Takashi Inoue, Haruyoshi Toyoda, Norihiro Fukuchi
Estimating the term…
A light source device 1 includes a laser light source 10 and an optical phase modulator 15 or the like. The optical phase modulator 15 inputs coherent light output from the laser light source 10 and transmitted through a beam splitter 14, phase-modulates the light according to the position on a beam cross section of the light, and outputs the phase-modulated light to the beam splitter 14. When (p+1) areas sectioned by p circumferences centered on a predetermined position are set on a beam cross section of light input to the optical phase modulator 15, the more outside each of the (p+1) areas is, the wider the radial width of the area, the amount of phase modulation is constant in each of the (p+1) areas, and the amounts of phase modulation differ by π between two adjacent areas out of the (p+1) areas.
A light source device comprising:
A light source device comprising:
Dependencies are inferred from the claim text.
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Details: arrangements of light sources specially adapted for photometry standard sources, also using luminescent or radioactive material
Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam: observing, e.g.…
By means of optical elements, e.g. lenses, mirrors or prisms: by using masks
Photometry, e.g. photographic exposure meter: details
About 2 years 11 months of term left · ends 11 Oct 2029 (estimated)
The present invention relates to a light source device for generating light having a predetermined phase distribution on a beam cross section of light, and an observing device and a processing device using the same.
In the case of observing an subject or processing a workpiece, light output from a light source such as a laser light source is focused and irradiated onto the subject or workpiece through an irradiating optical system including lenses etc. It is known that the beam waist diameter being a measure of the size of the focusing diameter when thus focused light can be reduced only to about a half of the wavelength of light. This is referred to as a diffraction limit. However, the diffraction limit is a matter in terms of Gaussian mode (or fundamental mode) light. On the other hand, the existence of high-order mode lights having more minute spatial structures than the diffraction limit is known.
Known as light beams having such properties are Bessel beams, Laguerre-Gaussian beams (hereinafter, referred to as “LG beams”), and polarization mode beams. Using such light beams allows effectively focusing the energy of light into a minute area smaller than the diffraction limit. In the past, there have been proposed, on the basis of this principle, inventions such as pickup devices, micro-processing technologies, and microscopes having resolutions smaller than the diffraction limit using Bessel beams.
FIG. 1 A configuration diagram of a light source device 1 according to a first embodiment.
FIG. 2 A view explaining phase modulation in a spatial light modulator 15.
FIG. 3 A view showing distribution examples of the amount of phase modulation in the optical phase modulator 15.
1, 2 . . . Light source device, 3 . . . Observing device, 4 . . . Processing device, 8 . . . Subject, 9 . . . Workpiece, 10 . . . Laser light source, 11, 12 . . . Convex lens, 13 . . . Aperture, 14 . . . Beam splitter, 15 . . . Optical phase modulator, 16 . . . Mirror, 17, 18 . . . Convex lens, 19 . . . CCD camera, 20 . . . Optical phase modulator, 21 . . . Mirror, 30 . . . Mirror, 31 . . . Beam splitter, 32 . . . Objective lens, 33 . . . Filter, 34 . . . Photodetector, 35 . . . Control unit, 36 . . . Display unit, 37 . . . Moving stage, 101 to 103 . . . Light source device, 110 . . . Surface-emitting laser element, 111 . . . Substrate, 112 . . . DBR layer, 113 . . . Cladding layer, 114 . . . Core layer, 115 . . . Active layer, 116 . . . Core layer, 117 . . . Cladding layer, 118 . . . DBR layer, 120 . . . Optical phase-modulation unit, 121 . . . First medium, 122 . . . Second medium, 130 . . . Surface-emitting laser element, 131 . . . Substrate, 132 . . . DBR layer, 133 . . . Cladding layer, 134 . . . Core layer, 135 . . . Active layer, 136 . . . Core layer, 137 . . . Cladding layer, 138 . . . DBR layer, 140 . . . Optical phase-modulation unit, 141 . . . First medium, 142 . . . Second medium, 150 . . . Surface-emitting laser element, 151 . . . Substrate, 152 . . . DBR layer, 153 . . . Cladding layer, 154 . . . Core layer, 155 . . . Active layer, 156 . . . Core layer, 157 . . . Cladding layer, 158 . . . DBR layer, 160 . . . Optical phase-modulation unit, 161 . . . First medium, 162 . . . Second medium, 170 . . . Reflective optical phase-modulation unit, 171 . . . First medium, 172 . . . Second medium, 180 . . . Reflective optical phase-modulation unit, 181 . . . First medium, 182 . . . Second medium, 191 . . . P-electrode, 192 . . . N-electrode.
Hereinafter, the best modes for carrying out the present invention will be described in detail with reference to the accompanying drawings. Here, in the description of the drawings, identical elements are designated by identical reference numerals so as to avoid overlapping descriptions.
First, description will be given of a first embodiment of a light source device according to the present invention. FIG. 1 is a configuration diagram of a light source device 1 according to the present embodiment. The light source device 1 shown in this figure includes a laser light source 10, a convex lens 11, a convex lens 12, an aperture 13, a beam splitter 14, a reflective optical phase modulator 15, a mirror 16, a convex lens 17, and a convex lens 18. Also shown in this figure is a CCD camera 19 for observing the intensity distribution in a beam cross section of light output from the convex lens 18.