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US 8,553,368 B2Granted
High aspect ratio motion limiter of a microactuator and method for fabrication
AssigneeHGST Netherlands B.V.
InventorsToshiki Hirano, Haruhide Takahashi
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Abstract
A high-aspect ratio motion limiter of a microactuator and a method for fabrication are disclosed. In one embodiment, at least one low-aspect ratio gap is created in a substrate of a microactuator of a hard disk drive. The low-aspect ratio gap is then utilized to facilitate the creation of a high-aspect ratio motion limiter in the substrate of the microactuator.
Claims16
A microactuator for a data storage device, said microactuator comprising:
- at least one integrated high-aspect ratio motion limiting structure formed in a substrate of a first thickness consisting of two parallel flat and of a unitary composition surfaces which are separated by a high-aspect ratio gap, said high-aspect ratio gap being one twentieth of said first thickness, wherein one of said two parallel flat and of a unitary composition surfaces is longer than a second of said two parallel flat and of a unitary composition surfaces.
A data storage device comprising:
- a housing;
- a disk pack mounted to the housing and comprising at least one disk that is rotatable relative to the housing, the disk pack defining an axis of rotation and a radial direction relative to the axis;
- a magnetic head support assembly mounted to the housing and being movable in a first direction that is perpendicular to said axis of rotation;
- and
- a microactuator coupled with said magnetic head support assembly and said microactuator comprising at least one integrated high-aspect ratio motion limiting structure consisting of two parallel flat and of a unitary composition surfaces formed in a substrate of a first thickness which are separated by at least one high-aspect ratio gap, said high-aspect ratio gap being one twentieth of said first thickness adjacent to a low-aspect ratio region in the substrate of said microactuator, wherein one of said two parallel flat and of a unitary composition surfaces is longer than a second of said two parallel flat and of a unitary composition surfaces.
2 more elements
Dependencies are inferred from the claim text.