US 8,553,216 B2 · Defect inspection device using catadioptric objective lens

Abstract

A defect inspection device comprises an inspection optical system including a light source, a half mirror for reflecting illumination light emitted from the light source, a catadioptric objective lens for collecting reflected light from the sample by illumination light reflected by the half mirror, an imaging lens for focusing the reflected light transmitted through the catadioptric objective lens, a relay lens having a blocking member provided at a position at which specularly reflected light from the sample is focused by the imaging lens, and a detector for detecting specularly reflected light not blocked by the blocking member; and a computation processing unit for detecting defects of the sample on the basis of the signals detected by the detector.

Claims21

Dependent claims

A defect inspection device comprising:

a light source;
a catadioptric objective lens configured to collect light reflected from a sample surface, said light originally emitted from said light source, and to transmit said collected light in a vertical direction in relation to the sample surface;
an imaging lens configured to focus specularly reflected light of said reflected light transmitted through said catadioptric objective lens;
a blocking member configured to block light, the blocking member being disposed at a position at which specularly reflected light of said reflected light is focused by said imaging lens;
a relay lens configured to focus reflected light not blocked by said blocking member;
a detector configured to detect reflected light focused by the relay lens;
and
a computation processing unit configured to detect defects of said sample, on the basis of reflected light detected by said detector.

5 more elements

A defect inspection device comprising:

a light source;
a catadioptric objective lens configured to collect light reflected from a sample surface, said light originally emitted from said light source, and to transmit said collected light in a vertical direction in relation to the sample surface;
an imaging lens configured to focus specularly reflected light of said reflected light transmitted through said catadioptric objective lens;
a first relay lens, including a blocking member configured to block light, the blocking member being disposed at a position on the first relay lens at which specularly reflected light of said reflected light is focused by said imaging lens;
a second relay lens configured to focus reflected light not blocked by said blocking member of said first relay lens, wherein said first relay lens is interposed between said imaging lens and said second relay lens;
a detector configured to detect reflected light focused by the second relay lens;
and
a computation processing unit configured to detect defects of said sample, on the basis of reflected light detected by said detector.

5 more elements

A defect inspection device comprising:

a light source;
a catadioptric objective lens configured to collect light reflected from a sample surface, said light originally emitted from said light source, and to transmit said collected light in a vertical direction in relation to the sample surface;
an imaging lens configured to focus specularly reflected light of said reflected light transmitted through said catadioptric objective lens;
a spatial filter, including a blocking member configured to block light, the blocking member being disposed at a position on the spatial filter at which specularly reflected light of said reflected light is focused by said imaging lens;
a relay lens configured to focus reflected light not blocked by said blocking member of said spatial filter, wherein said spatial filter is interposed between said imaging lens and said relay lens;
a detector configured to detect reflected light focused by the relay lens;
and
a computation processing unit configured to detect defects of said sample, on the basis of reflected light detected by said detector.

5 more elements

Dependencies are inferred from the claim text.

Defect inspection device using catadioptric objective lens

Life of this patent

Defect inspection device using catadioptric objective lens

Life of this patent

Abstract

Claims21