Piezoelectric vibrator, method of manufacturing piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece
AssigneeSeiko Instruments Inc.
InventorJunya Fukuda
Life of this patent
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Abstract
A piezoelectric vibrator includes a tuning fork type piezoelectric vibrating reed including a pair of vibration arm portions; a package that accommodates the piezoelectric vibrating reed; and a getter material that is formed along the longitudinal direction of the vibration arm portion in an inner portion of the package, wherein a cross-sectional area of a middle portion of the getter material adjacent to a center portion of the longitudinal direction of the vibration arm portion is greater than that of an end portion of the getter material.
Claims9
A piezoelectric vibrator comprising:
- a tuning fork type piezoelectric vibrating reed including a pair of vibration arm portions;
- a package that accommodates the piezoelectric vibrating reed;
- and
- a getter material that is formed along a longitudinal direction of the vibration arm portion in an inner portion of the package,
- wherein a cross-sectional area of a middle portion of the getter material adjacent to a center portion of the longitudinal direction of the vibration arm portion is greater than that of an end portion of the getter material.
A method of manufacturing a piezoelectric vibrator, which includes a tuning fork type piezoelectric vibrating reed that includes a pair of vibration arm portions, a package that accommodates the piezoelectric vibrating reed, and a getter material that is formed along a longitudinal direction of the vibration arm portions in an inner portion of the package, the method comprising:
- a first gettering process comprising activating a middle portion of the getter material adjacent to center portions of a longitudinal direction of the vibration arm portions;
- and
- a second gettering process comprising activating an end portion of the getter material,
- such that a cross-sectional area of a middle portion of the getter material adjacent to a center portion of the longitudinal direction of the vibration arm portion is greater than that of an end portion of the getter material.
Dependencies are inferred from the claim text.