Apparatus for measuring conductive pattern on substrate
AssigneeIndustrial Technology Research Institute
InventorsYong-Tong Zou, Ding-Kun Liu, Hau-Wei Wang, Chih-Hsiang Chan
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Abstract
An embodiment of the invention provides an apparatus for measuring a conductive pattern on a substrate, which includes a first electro-optical modulator surrounding at least one first detecting roller; transmission rollers for transferring the substrate and allowing direct contact of the substrate and the first electro-optical modulator; a voltage supplier for providing a bias between the first electro-optical modulator and the substrate; and a first image detecting system for receiving a first detecting light reflected from a first surface of the substrate.
Claims26
An apparatus for measuring a conductive pattern on a substrate, comprising:
- a first electro-optical modulator surrounding at least one first detecting roller;
- transmission rollers for transferring the substrate and allowing direct contact of the substrate and the first electro-optical modulator;
- a voltage supplier for providing a bias between the first electro-optical modulator and the substrate;
- and
- a first image detecting system for receiving a first detecting light reflected from a first surface of the substrate.
An apparatus for measuring a conductive pattern on a substrate, comprising:
- a first electro-optical modulator surrounding a first detecting roller, wherein the first detecting roller is for transferring the substrate on one side of the first detecting roller and allowing direct contact of the substrate and the first electro-optical modulator;
- a voltage supplier for providing a bias between the first electro-optical modulator and the substrate;
- and
- a first light source system for providing a first detecting light to the substrate, wherein the first light source system is disposed within the first detecting roller such that the first detecting light passes through the first electro-optical modulator and is received by a first image detecting system.
An apparatus for measuring a conductive pattern on a substrate, comprising:
- a first electro-optical modulator surrounding a first detecting roller;
- a first transmission roller for transferring the substrate on one side of the first transmission roller and allowing direct contact of the substrate and the first electro-optical modulator;
- a voltage supplier for providing a bias between the first electro-optical modulator and the substrate;
- and
- a first light source system for providing a first detecting light to the substrate, wherein the first light source system is disposed within the first transmission roller such that the first detecting light passes through the first electro-optical modulator and is received by a first image detecting system located within the first detecting roller.
An apparatus for measuring a conductive pattern on a substrate, comprising:
- a first electro-optical modulator surrounding a first detecting roller, wherein the first detecting roller is for transferring the substrate on one side of the first detecting roller and allowing direct contact of the substrate and the first electro-optical modulator;
- a voltage supplier for providing a bias between the first electro-optical modulator and the substrate;
- and
- a first light source system for providing a first detecting light to the substrate, wherein the first light source system is disposed on an opposite side of the substrate opposite to the first detecting roller such that the first detecting light passes through the first electro-optical modulator and is received by a first image detecting system located within the first detecting roller.
An apparatus for measuring a conductive pattern on a substrate, comprising:
- a first electro-optical modulator surrounding a first detecting roller;
- a first transmission roller for transferring the substrate on one side of the first transmission roller and allowing direct contact of the substrate and the first electro-optical modulator;
- a voltage supplier for providing a bias between the first electro-optical modulator and the substrate;
- and
- a first light source system for providing a first detecting light to the substrate, wherein the first light source system is disposed within the first detecting roller such that the first detecting light passes through the first electro-optical modulator and is received by a first image detecting system located within the first transmission roller.
Dependencies are inferred from the claim text.