Current measurement method, inspection method of semiconductor device, semiconductor device, and test element group

A method for measuring current, comprising the steps of:

• applying a first potential to a first terminal of a transistor for evaluation;
• applying a second potential to a first terminal of a transistor for injection of charge;
• accumulating predetermined charge in a node where a second terminal of the transistor for evaluation and a second terminal of the transistor for injection of charge are connected to each other while the transistor for injection of charge is in an on state;
• turning off the transistor for injection of charge;
• measuring an amount of change in a potential of the node, due to change in an amount of the charge held in the node;
• and
• calculating a value of current flowing between the first terminal and the second terminal of the transistor for evaluation, from the amount of change in the potential.