Plasma formation region control apparatus and plasma processing apparatus
AssigneeImagineering, Inc.
InventorYuji Ikeda
Life of this patent
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Abstract
There is provided a plasma formation region control apparatus, with which a large-scale plasma can be obtained under a high pressure with ease and at low cost. The plasma formation region control apparatus comprises a microwave oscillator, an antenna connected to the microwave oscillator, and controller for controlling the position of each of the microwave oscillator and the antenna. The controller positions the antenna towards a plasma formation region in accordance with a specification for a plasma region for respective points in time t; establishes a driving sequence for the microwave oscillator based on the temperature state of the specified plasma; and drives the microwave oscillator according to the driving sequence.
Claims20
A plasma formation region control apparatus for controlling a region of plasma formation under a pressure equal to or exceeding atmospheric pressure, the plasma formation region control apparatus comprising:
- one or a plurality of electromagnetic wave oscillators;
- one or a plurality of antennas connected to the electromagnetic wave oscillator;
- and
- controller controlling the electromagnetic wave oscillator and the antenna;
- wherein
- the controller positions the antenna in accordance with a spatial distribution of an electrical field that corresponds to a plasma formation region, the spatial distribution being based on a specification for the plasma region for respective points in time;
- establishes a sequence for driving the electromagnetic wave oscillator based on the state of radicals, ions, or a gas, or the electron density, within the specified plasma;
- and drives the electromagnetic wave oscillator according to the sequence.
A plasma formation region control apparatus for controlling a region of plasma formation under a pressure equal to or exceeding atmospheric pressure, the plasma formation region control apparatus comprising:
- one or a plurality of electromagnetic wave oscillators;
- one or a plurality of antennas connected to the electromagnetic wave oscillator;
- and
- controller controlling the electromagnetic wave oscillator and the antenna;
- wherein
- the controller positions the antenna in accordance with a spatial distribution of an electrical field that corresponds to a plasma formation region, the spatial distribution being based on a specification for the plasma region for respective points in time;
- establishes a sequence for driving the electromagnetic wave oscillator based on a state function of the specified plasma, the intensity of plasma emission, or the intensity of an emission element within a predetermined wavelength range, or of the electron temperature, travel velocity, or path;
- and drives the electromagnetic wave oscillator according to the sequence.
Dependencies are inferred from the claim text.