Semiconductor device having ring-shaped gate electrode, design apparatus, and program
AssigneeElpida Memory, Inc.
InventorTakamitsu Onda
Life of this patent
Estimating the term…
Abstract
A semiconductor device includes: a substrate; a transistor that has a ring-shaped gate electrode formed on the substrate; a plurality of external dummy electrodes that are arranged outside the gate electrode and are formed in the same layer as the gate electrode; and at least one internal dummy electrode that is arranged inside the gate electrode and is formed in the same layer as the gate electrode.
Claims17
A semiconductor device comprising:
- a substrate;
- a transistor that has a ring-shaped gate electrode formed on the substrate;
- a plurality of external dummy electrodes that are arranged outside the gate electrode and are formed in a same layer as the gate electrode;
- and
- at least one internal dummy electrode that is arranged inside the gate electrode and is formed in the same layer as the gate electrode.
A semiconductor device comprising a comparison circuit that compares a voltage to be compared and a reference voltage, and outputs a comparison result signal having a voltage corresponding to the result of comparison, wherein
- the comparison circuit including:
- first and second transistors that are connected in parallel between a power supply wiring and a ground wiring,
- a third transistor that is connected between the first transistor and the power supply wiring, and
- a fourth transistor that is connected between the second transistor and the power supply wiring, wherein
- a gate of the third transistor, a gate of the fourth transistor, and a connection point between the first transistor and the third transistor are connected to one another,
- the reference voltage is supplied to either one of gates of the first and second transistors,
- the voltage to be compared is supplied to other of the gates of the first and second transistors,
- the comparison result signal is output from a connection point between the second transistor and the fourth transistor,
- the first to fourth transistors have respective ring-shaped first to fourth gate electrodes, wherein
- the semiconductor device further comprises:
- a plurality of external dummy electrodes that are arranged outside the first to fourth gate electrodes;
- and
- first to fourth internal dummy electrodes that are arranged inside the first to fourth gate electrodes, respectively, and wherein
- the first to fourth gate electrodes, the plurality of external dummy electrodes, and the first to fourth internal dummy electrodes are formed in the same layer.
A semiconductor device comprising:
- a substrate;
- first to fifth transistors that each includes a ring-shaped gate electrode formed on the substrate, a gate insulating film formed between the gate electrode and the substrate, a first diffusion region formed in the substrate corresponding to outside the gate electrode, and a second diffusion region formed in the substrate corresponding to inside the gate electrode;
- a first internal dummy electrode that is arranged inside and is formed in a same layer as the gate electrodes of the first transistor;
- a second internal dummy electrode that is arranged inside and is formed in the same layer as the gate electrode of the second transistor;
- a third internal dummy electrode that is arranged inside and is formed in the same layer as the gate electrode of the third transistor;
- a fourth internal dummy electrode that is arranged inside and is formed in the same layer as the gate electrode of the fourth transistor;
- a fifth internal dummy electrode that is arranged inside and is formed in the same layer as the gate electrode of the fifth transistor;
- first element isolation region that is embedded in the substrate corresponding to inside the gate electrodes of the first transistor;
- second element isolation region that is embedded in the substrate corresponding to inside the gate electrodes of the second transistor;
- substrate potential wiring that supplies a substrate potential;
- and
- a contact conductor that connects the substrate potential wiring and the substrate, wherein
- the first internal dummy electrode is formed on the first element isolation region,
- the second element isolation region has an opening,
- the contact conductor connecting the substrate potential wiring and the substrate through the opening,
- no element isolation region being formed in a region corresponding to inside the gate electrode of the third transistor,
- a plurality of the fourth internal dummy electrodes is provided,
- the fifth internal dummy electrode having a ring shape.
Dependencies are inferred from the claim text.