Proximity charge sensing for semiconductor detectors
AssigneeThe Regents of the University of California
InventorsPaul N. Luke, Craig S. Tindall, Mark Amman
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AssigneeThe Regents of the University of California
InventorsPaul N. Luke, Craig S. Tindall, Mark Amman
Estimating the term…
A non-contact charge sensor includes a semiconductor detector having a first surface and an opposing second surface. The detector includes a high resistivity electrode layer on the first surface and a low resistivity electrode on the high resistivity electrode layer. A portion of the low resistivity first surface electrode is deleted to expose the high resistivity electrode layer in a portion of the area. A low resistivity electrode layer is disposed on the second surface of the semiconductor detector. A voltage applied between the first surface low resistivity electrode and the second surface low resistivity electrode causes a free charge to drift toward the first or second surface according to a polarity of the free charge and the voltage. A charge sensitive preamplifier coupled to a non-contact electrode disposed at a distance from the exposed high resistivity electrode layer outputs a signal in response to movement of free charge within the detector.
A non-contact charge sensor comprising:
A method of non-contact charge sensing comprising:
A non-contact charge sensor having a reduced spectral background, comprising:
A method of non-contact charge sensor having a reduced spectral background, comprising:
A non-contact charge sensor having a reduced spectral background, comprising:
A method of non-contact charge sensor having a reduced spectral background, comprising:
Dependencies are inferred from the claim text.