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US 8,552,377 B2Granted
Particle detection system
AssigneeHermes Microvision, Inc.
InventorsYi-Xiang Wang, Joe Wang, Weiming Ren
Life of this patent
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Abstract
This invention provides a design to process a large range of detection beam current at low noise with a single detector. With such a design, the detection system can generate up to 1010 gain and maximum signal output at more than mini Ampere (mA) level. A condenser lens is configured to increase bandwidth of the detector that scan speed can be enhanced.
Claims16
A particle detection system, comprising:
- a charged particle multiplier device for receiving original particles to be detected and generating a plurality of multiplied charged particles;
- a charged particle detection device for receiving the plurality of multiplied charged particles and generating output signal corresponding to the original particles;
- and
- a condenser lens is configured between said charged particle multiplier device and said charged particle detection device to converge the plurality of multiplied charged particles into said charged particle detection device.
1 more element
Dependencies are inferred from the claim text.