Method and system of evaluating distribution of lattice strain on crystal material
AssigneeElpida Memory, Inc.
InventorKazuhiro Nojima
Life of this patent
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Abstract
A crystal material lattice strain evaluation method includes illuminating a sample having a crystal structure with an electron beam in a zone axis direction, and selectively detecting a certain diffracted wave diffracted in a certain direction among a plurality of diffracted waves diffracted by the sample. The method further includes repeating the illuminating step and the selectively detecting step while scanning the sample, and obtaining a strain distribution image in a direction corresponding to the certain diffracted wave from diffraction intensity at each point of the sample.
Claims18
A method of evaluating a distribution of lattice strain on crystal material, the method comprising:
- illuminating a sample having a crystal structure with an electron beam in a zone axis direction (termed as “illuminating step”) and selectively detecting a certain diffracted wave diffracted in a certain direction among a plurality of diffracted waves diffracted by the sample (termed as “selectively detecting step”);
- and
- repeating said illuminating step and said selectively detecting step while scanning the sample, and obtaining a strain distribution image in a direction corresponding to the certain diffracted wave from diffraction intensity at each point of the sample (termed as “strain distribution image obtaining step”).
A system of evaluating a distribution of lattice strain on crystal material, the system comprising:
- a scanning transmission electron microscope that illuminates a sample with an electron beam, scans the sample, and detects a diffracted wave transmitted or diffracted by the sample;
- and
- a strain distribution image extraction unit that selects a certain diffracted wave among diffracted waves transmitted or diffracted by the sample, and obtains a strain distribution image.
A non-transitory computer-readable recording medium storing a computer program used in an evaluation system comprising a scanning transmission electron microscope and a computer that controls the scanning transmission electron microscope and processes measurement data obtained by the scanning transmission electron microscope, the computer program causing the computer to execute processes of:
- controlling the scanning transmission electron microscope so that a sample having a crystal structure is illuminated with an electron beam and a diffracted wave transmitted or diffracted by the sample is detected;
- and
- scanning the sample, selecting a certain diffracted wave among diffracted waves transmitted or diffracted by the sample, and obtaining a strain distribution image.
Dependencies are inferred from the claim text.