Processing exception handling
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPo-Feng Tsai, Jin-Ning Sung, Yen-Di Tsen, Jo Fei Wang, Jong-I Mou
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Abstract
In accordance with an embodiment, a method for exception handling comprises accessing an exception type for an exception, filtering historical data based on at least one defined criterion to provide a data train comprising data sets, assigning a weight to each data set, and providing a current control parameter. The data sets each comprise a historical condition and a historical control parameter, and the weight assigned to each data set is based on each historical condition. The current control parameter is provided using the weight and the historical control parameter for each data set.
Claims18
A method for exception handling, the method comprising:
- accessing an exception type for an exception occurring for a manufacturing process, the exception interrupting a control flow of a process control system of the manufacturing process;
- filtering historical data of the manufacturing process, the filtering further comprising determining which of a plurality of filters to perform the filtering based upon the exception type, the filtering being based on at least one defined criterion to provide a data train comprising data sets, wherein the data sets each comprise a historical condition of the manufacturing process and a historical control parameter of the manufacturing process;
- assigning a weight to each data set based on each historical condition, the assigning the weight comprising determining which of a plurality of weighting calculators to perform the assigning the weight;
- and
- using a processor, providing a current control parameter for the manufacturing process, the current control parameter corresponding to the historical control parameter in type, the providing the current control parameter using the weight and the historical control parameter for each data set, the current control parameter to be used by a manufacturing tool to control an operation of the manufacturing process.
A computer program product for providing a processing control parameter, the computer program product having a non-transitory medium with a computer program embodied thereon, the computer program comprising:
- computer program code for filtering historical data of a manufacturing process when an exception occurs in the manufacturing process to provide a data train comprising data sets, the computer program code for filtering comprising computer program code for determining which one of a plurality of filters for performing the filtering will be initiated based upon an exception type of the exception, the exception interrupting a control flow of a process control system of the manufacturing process, the data sets each comprising a historical condition of the manufacturing process and a historical parameter of the manufacturing process, the computer program code for filtering accessing the historical data from a storage medium;
- computer program code for assigning a weight to each data set based on a statistical analysis of the data train, the computer program code for assigning the weight comprising computer program code for determining which one of a plurality of weighting calculators for performing the assigning of the weight to each data set will be initiated;
- and
- computer program code for determining a suggested control parameter based on the weights, the suggested control parameter corresponding in type to the historical parameter and to be used by a manufacturing tool to control an operation of the manufacturing process.
A method for processing control exception handling, the method comprising:
- determining an exception type when an exception occurs in a manufacturing process, the exception interrupting a control flow of a process control system of the manufacturing process;
- initiating one filter of a plurality of filters and one weighting calculator of a plurality of weighting calculators based on the exception type;
- filtering historical data of the manufacturing process by the one filter to provide a data train, the data train comprising data sets, each of the data sets including a historical condition of the manufacturing process and a historical parameter of the manufacturing process;
- and
- using a processor, providing a suggested parameter based on the historical parameter for each respective data set and on a weight of each data set determined by the one weighting calculator, the suggested parameter corresponding to the historical parameter in type, the suggested parameter to be used by a manufacturing tool to control an operation of the manufacturing process.
Dependencies are inferred from the claim text.