Ceramic, piezoelectric device, and production method thereof
AssigneesCanon Kabushiki Kaisha, University of Yamanashi
InventorsHiroshi Saito, Takanori Matsuda, Kenji Takashima, Nobuhiro Kumada
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Abstract
To provide a piezoelectric ceramic containing BiFeO3 having a {110} plane orientation in a pseudo-cubic form, which is suited for the domain engineering, the piezoelectric ceramic includes a perovskite-type metal oxide represented by the following general formula (1), and has a {110} plane orientation in a pseudo-cubic form: xBiFeO3-(1−x)ABO3 General Formula (1) where A and B each represent one kind or more of metal ions; A represents a metal ion having a valence of 1, 2 or 3; and B represents a metal ion having a valence of 3, 4, or 5, provided that x is within a range of 0.3≦x≦1.
Claims6
A ceramic having a {110} plane orientation in a pseudo-cubic form, which comprises a perovskite-type metal oxide represented by general formula (1):
- xBiFeO3-(1−x)ABO3 (1),
- where A represents at least one kind of a metal ion having a valence of 1, 2 or 3;
- and B represents at least one kind of a metal ion having a valence of 3, 4, or 5, provided that x is within a range of 0.3≦x≦1,
- wherein a {110}-oriented portion of the ceramic has a thickness of 50 μm or more.
A method of producing a piezoelectric device, comprising:
- a slurry step of obtaining a ceramic slurry comprising a ceramic powder comprising a perovskite-type metal oxide represented by general formula (1);
- an orientation step of forming the ceramic slurry in a magnetic field to obtain an oriented ceramic compact body;
- a sintering step of sintering the ceramic compact body to obtain a ceramic sintered body;
- and
- an electrode formation step of forming a pair of electrodes on the ceramic sintered body,
- wherein the ceramic powder in the slurry step contains 30 mol % or more of BiFeO3, which is dissolved or mixed:
- xBiFeO3-(1−x)ABO3 (1),
- where A represents at least one kind of a metal ion having a valence of 1, 2 or 3;
- and B represents at least one kind of a metal ion having a valence of 3, 4, or 5, provided that x is within a range of 0.3≦x≦1.
Dependencies are inferred from the claim text.