Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof

A flat substrate structure or a flat formed cap structure to be used in a multiple component element intended to be subsequently individualized in order to form components containing active structures, the flat substrate structure or cap structure comprising:

• first regions, recesses or depressions and second regions, recesses or depressions;
• at least one of a rotary rate sensor, accelerometer, actuator, resonator, display, digital micro-mirror, bolometer and a RF-switch for placement in each of the first regions, recesses, or depressions;
• and
• a first getter material for placement in each of the first regions, recesses or depressions wherein the second regions, recesses or depressions comprise one of no getter material and a second getter material with gas absorption characteristics different from those of the first getter material.

A component for Microsystems technology comprising:

• a single substrate and a cap structure that are connected to each other such that they define at least one first cavity and at least one second cavity, the first and second cavity arc cavities being sealed against each other and against their outside;
• at least one of a rotary rate sensor, accelerometer, actuator, resonator, display, digital micro-mirror, bolometer and a RF-switch arranged in at least one first cavity;
• and
• a first getter material provided in at least one first cavity so as to effect a different internal pressure and a different gas composition within the first and second cavities.

A method for producing a component comprising a substrate and a cap structure that are connected to each other such that they define therebetween at least one first cavity and at least one second cavity comprising the steps of:

• providing a flat substrate and a cap structure, one of which is coated with a first getter material in a location that will at least partially define the first cavity;
• aligning the substrate and the cap structure to form a paired substrate and cap structure;
• positioning the paired substrate and cap structure into a production chamber;
• flushing the production chamber with a production gas comprising at least a first gas that is absorbable by the first getter material;
• putting the cap structure and the substrate into contact with one another and bonding the cap structure and the substrate together;
• and
• activating the first getter material such that it absorbs molecules of the first gas.