Charged particle beam irradiation apparatus, charged particle beam irradiating method, and method of attaching and detaching transport line

A charged particle beam irradiating method of irradiating an irradiation target in a plurality of irradiation chambers with a charged particle beam, the method comprising:

• a charged particle beam acceleration step of accelerating the charged particle beam by an accelerator,
• a first transport step of transporting the charged particle beam accelerated at the charged particle beam acceleration step by a first transport line;
• a second transport step of transporting the charged particle beam to be transported at the first transport step to the plurality of irradiation chambers, by any of second transport lines provided for each of the plurality of irradiation chambers;
• and
• a line switching step of selectively switching the second transport line of an induction place by a line switching unit that is provided between the first transport line and the second transport lines and induces the charged particle beam from the first transport line to any one of second transport lines,
• wherein the plurality of irradiation chambers is radially disposed around the line switching unit,
• the line switching unit includes an electromagnet that induces the charged particle beam, and a rotating mechanism that rotates the electromagnet, and
• at the line switching step, the second transport lines of the induction place are switched by rotating the electromagnet,
• wherein the line switching unit includes
• a tubular connection line that is provided with an electromagnet, mediates a connection between the first transport line of a tubular shape and the second transport line of a tubular shape, and causes the charged particle beam to pass therethrough;
• a rotation support portion that rotatably supports the tubular connection line and the electromagnet around a connection portion between one end of the tubular connection line and the first transport line;
• and
• a movement connection portion that is provided in another end of the tubular connection line and is moved in each position capable of being connected to the respective second transport lines along with a rotation of the tubular connection line and the electromagnet,
• in an upstream end portion of the second transport line, a second transport line opening and closing valve is provided which opens and closes the second transport lines,
• the movement connection portion includes
• a connection line opening and closing valve that opens and closes the tubular connection line;
• and
• a tubular expansion and contraction portion that is provided at a downstream side further than the connection line opening and closing valve, and is attached to and detached from the upstream end portion of the second transport line by being expanded and contracted in an advancement direction of the charged particle beam, and
• the line switching step includes
• a first step of opening a vacuum in the tubular expansion and contraction portion by closing the second transport line opening and closing valve of the second transport line to be connected to the movement connection portion and the connection line opening and closing valve;
• a second step of shortening the tubular expansion and contraction portion to eliminate a connection between the tubular expansion and contraction portion and the second transport line;
• a third step of rotating the connection line and the electromagnet to move the movement connection portion to another second transport line;
• a fourth step of expanding the tubular expansion and contraction portion, connecting the same to the upstream end portion of another second transport line, and drawing the vacuum in the tubular expansion and contraction portion;
• and
• a fifth step of opening the second transport line opening and closing valve of another second transport line and the connection line opening and closing valve.