# US 8,542,853 B2 · Sound transducer structure and method for manufacturing a sound transducer structure

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- Number: US 8,542,853 B2
- Document ID: US8542853B2
- Status: Granted
- Kind: B2
- Application number: 13/069,166
- Filed: 2011-03-22
- Published: 2011-07-14
- Granted: 2013-09-24
- Earliest claimed: 2006-11-03
- Assignees: Infineon Technologies AG
- Applicants: Alfons Dehe; Stefan Barzen; Marc Fueldner
- Inventors: Alfons Dehe; Stefan Barzen; Marc Fueldner
- Web page: https://patentgrep.com/patent/US8542853B2

## CPC

- H04R 19/04: Microphones (H04R19/01 takes precedence)
- H04R 7/00: Diaphragms for electromechanical transducers (in general F16J3/00); Cones (for musical instruments G10 ){(cones, diaphragms or the like, for emitting or receiving sound in general G10K13/00; Mounting thereof)}
- H04R 19/005: {using semiconductor materials}
- H04R 31/00: Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor {(manufacture of microstructural arrangements of deformable or non-deformable structures in general B81C1/00182)}
- H04R 31/003: {for diaphragms or their outer suspension}
- H04R 31/006: {Interconnection of transducer parts (of diaphragm and outer suspension by moulding H04R31/003)}
- Y10T 29/49005: Acoustic transducer
- H04R: LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS (producing sounds with frequency not determined by supply frequency G10K)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A sound transducer structure includes a membrane, a counter electrode, and a plurality of elevations. The membrane includes a first main surface, made of a membrane material, in a sound transducing region and an edge region of the membrane. The counter electrode is made of counter electrode material, and includes a second main surface arranged in parallel to the first main surface of the membrane on a side of a free volume opposite the first main surface of the membrane. The plurality of elevations extend in the sound transducing region from the second main surface of the counter electrode into the free volume.

## Claims

### Claim 1

A sound transducer structure, comprising:
a membrane comprising a first main surface, the first main surface of the membrane made of a membrane material in a sound transducing region and an edge region;
a counter electrode made of counter electrode material, the counter electrode comprising a first main surface and a second main surface, the second main surface of the counter electrode arranged in parallel to the first main surface of the membrane on a side of a free volume opposite the first main surface of the membrane; and
stability improvement material arranged on the second main surface of the counter electrode material, the stability improvement material comprising a greater mechanical stability than the counter electrode material.

### Claim 2 (depends on 1)

The sound transducer structure according to claim 1, wherein a ratio of the thickness of the stability improvement material and the counter electrode material is between 1:100 and 1:1.

### Claim 3 (depends on 1)

The sound transducer structure according to claim 1, wherein the stability improvement material is silicon nitride, silicon oxy nitride or metal silicide.

### Claim 4 (depends on 1)

The sound transducer structure according to claim 1, additionally comprising:
a plurality of elevations extending in the sound transducing region from the second main surface of the counter electrode into the free volume.