# US 8,542,343 B2 · Lithographic apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,542,343 B2 - Document ID: US8542343B2 - Status: Granted - Kind: B2 - Application number: 12/850,487 - Filed: 2010-08-04 - Published: 2011-06-30 - Granted: 2013-09-24 - Earliest claimed: 2003-10-28 - Assignees: ASML Netherlands B.V. - Applicants: Christiaan Alexander Hoogendam; Bob Streefkerk; Johannes Catharinus Hubertus Mulkens; Erik Theodorus Maria Bijlaart; Aleksey Yurievich Kolesnychenko; Erik Roelof Loopstra; Jeroen Johannes Sophia Maria Mertens; Bernardus Antonius Slaghekke; Patricius Aloysius Jacobus Tinnemans; Helmar Van Santen - Inventors: Christiaan Alexander Hoogendam; Bob Streefkerk; Johannes Catharinus Hubertus Mulkens; Erik Theodorus Maria Bijlaart; Aleksey Yurievich Kolesnychenko; Erik Roelof Loopstra; Jeroen Johannes Sophia Maria Mertens; Bernardus Antonius Slaghekke; Patricius Aloysius Jacobus Tinnemans; Helmar Van Santen - Web page: https://patentgrep.com/patent/US8542343B2 ## CPC - G03F 7/70866: {of mask or workpiece} - G03F 7/70341: {Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply (chemical composition of immersion liquids G03F7/2041)} - G03F 7/70808: {Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract Liquid is supplied to a space between the projection system and the substrate by an inlet. In an embodiment, an overflow region removes liquid above a given level. The overflow region may be arranged above the inlet and thus the liquid may be constantly refreshed and the pressure in the liquid may remain substantially constant. ## Claims ### Claim 1 A lithographic projection apparatus, comprising: a movable table; a projection system configured to project a patterned beam of radiation onto a target portion of a substrate; a liquid supply system configured to at least partly fill a space between the projection system and the table with a liquid to form a liquid reservoir covering a smaller area than the substrate, the liquid supply system comprising a liquid confinement structure extending along at least a part of the boundary of the space and having an inlet configured to provide liquid to the liquid reservoir, the inlet having an opening between the table and a bottom surface of an optical element of the projection system, the optical element arranged to contact the liquid in the liquid reservoir; and a passage between the optical element and an inner periphery of the liquid confinement structure to allow movement of liquid to an overflow region from the liquid reservoir. ### Claim 2 (depends on 1) The apparatus according to claim 1, wherein the overflow region is arranged above the opening of the inlet. ### Claim 3 (depends on 1) The apparatus according to claim 1, further comprising an entrance to the overflow region positioned at an upper surface of the liquid confinement structure. ### Claim 4 (depends on 3) The apparatus according to claim 3, wherein the overflow region is arranged such that the liquid only flows into the overflow region when the liquid flows over the top of the liquid confinement structure. ### Claim 5 (depends on 3) The apparatus according to claim 3, wherein the liquid confinement structure further comprises a ridge having an area which is equal to or larger than an area of the optical element. ### Claim 6 (depends on 1) The apparatus according to claim 1, wherein the space above the liquid in the passage is sealed with a gas tight member. ### Claim 7 (depends on 1) The apparatus according to claim 1, wherein the overflow region maintains the pressure above the liquid at a substantially constant level. ### Claim 8 (depends on 1) The apparatus according to claim 1, wherein the overflow region is arranged to remove liquid at the end of at least part of the passage. ### Claim 9 (depends on 1) The apparatus according to claim 1, wherein the inlet opening is adjacent to an inner periphery of the liquid confinement structure and directed towards the target portion of the substrate. ### Claim 10 (depends on 1) The apparatus of claim 1, wherein the liquid confinement structure defines an open aperture through which the patterned beam is projected, the aperture being between the bottom surface of the optical element of the projection system and the table, and the liquid confinement structure further comprises an outlet, having an opening in a side of the liquid confinement structure that faces the table and below the aperture, to remove liquid from the space. ### Claim 11 (depends on 1) The apparatus of claim 1, wherein the liquid confinement structure defines an open aperture through which the patterned beam is projected, the aperture being between the bottom surface of the optical element of the projection system and the table, and the inlet is configured to provide liquid to the space above the aperture, an opening of the inlet being adjacent to an inner periphery of the liquid confinement structure. ### Claim 12 (depends on 1) The apparatus of claim 1, wherein at least part of the inlet extends diagonally, with respect to a horizontal top surface of the table, toward the table and the opening is between the bottom surface of the optical element and the table. ### Claim 13 (depends on 1) The apparatus of claim 1, wherein the liquid confinement structure has a bottom surface facing the table and an upper surface above the bottom surface of the optical element of the projection system, the upper surface having the overflow region, and wherein liquid from the inlet opening flows to contact the bottom surface of the optical element, flows to below the bottom surface of the liquid confinement structure and flows toward the passage. ### Claim 14 A lithographic projection apparatus, comprising: a movable table; a projection system configured to project a patterned beam of radiation onto a target portion of a substrate; and a liquid supply system configured to at least partly fill a space between the projection system and the table with a liquid, the space covering a smaller area than the substrate; and a barrier configured to bound the liquid, the barrier having a ridge with an area equal to or larger than the area of a surface of a final element of the projection system configured to be in contact with the liquid. ### Claim 15 (depends on 14) The apparatus according to claim 14, wherein the barrier is part of the liquid supply system. ### Claim 16 (depends on 14) The apparatus according to claim 14, further comprising; a liquid confinement structure extending along at least a part of the boundary of the space between the projection system and the substrate, the liquid confinement structure and the projection system configured to form a passage; and an outlet configured to remove liquid from the space and to remove liquid from at least part of the passage. ### Claim 17 (depends on 14) The apparatus according to claim 14, further comprising; a liquid confinement structure extending along at least a part of the boundary of the space between the projection system and the substrate; and an inlet configured to provide liquid to the space, an opening of the inlet being adjacent to an inner periphery of the liquid confinement structure and directed towards the target portion of the substrate. ### Claim 18 (depends on 14) The apparatus of claim 14, wherein the barrier comprises, in a side of the barrier that faces the table, an opening of an outlet to remove liquid from the space. ### Claim 19 (depends on 14) The apparatus of claim 14, wherein the barrier extends along at least a part of the boundary of the space between the projection system and the table and defines an open aperture through which the patterned beam is projected, the aperture being between the projection system and the table, and the barrier further comprises an inlet to provide liquid to the space above the aperture, an opening of the inlet adjacent to an inner periphery of the barrier. ### Claim 20 A lithographic projection apparatus, comprising: a movable table; a projection system configured to project a patterned beam of radiation onto a target portion of a substrate; a liquid supply system configured to at least partly fill a space, covering a smaller area than the substrate, between the projection system and the table with a liquid, the liquid supply system comprising: an inlet configured to provide liquid to the space, the inlet having an opening of the inlet between the table and a bottom surface of an optical element of the projection system, the optical element arranged to contact the liquid in the space, an outlet configured to remove liquid from the space, an opening of the outlet located below the inlet opening and outwardly, relative to an optical axis through the space, of the inlet opening, and a liquid confinement structure extending along at least a part of the boundary of the space, the opening of the inlet being adjacent to an inner periphery of the liquid confinement structure and directed towards the target portion of the substrate; and a passage between the optical element and the inner periphery of the liquid confinement structure to receive liquid from the space. ### Claim 21 (depends on 20) The apparatus according to claim 20, further comprising an outlet configured to remove liquid from the passage. ### Claim 22 (depends on 21) The apparatus according to claim 21, wherein the outlet is at the end of the passage. ### Claim 23 (depends on 20) The apparatus according to claim 20, further comprising a chamber, through which the liquid is supplied to the inlet, the chamber having a cross-sectional area larger than a cross-sectional area of the inlet. ### Claim 24 (depends on 20) The apparatus according to claim 20, further comprising an overflow region. ### Claim 25 (depends on 20) The apparatus of claim 20, wherein an entrance to an overflow region is positioned on a side of the liquid confinement structure opposite to a side of the liquid confinement structure that faces the table. ### Claim 26 (depends on 25) The apparatus of claim 25, wherein the overflow region is arranged such that the liquid only flows into the overflow region when the liquid flows over the top of the liquid confinement structure. ### Claim 27 (depends on 20) The apparatus of claim 20, wherein the liquid confinement structure defines an open aperture through which the patterned beam is projected, the aperture being between the inlet opening and the table, and the liquid confinement structure further comprises an outlet, having an opening in a side of the liquid confinement structure that faces the table and below the aperture, to remove liquid from the space. ### Claim 28 (depends on 20) The apparatus of claim 20, wherein the liquid confinement structure defines an open aperture through which the patterned beam is projected, the aperture being between the projection system and the table, and the inlet is configured to provide liquid to the space above the aperture. ### Claim 29 (depends on 20) The apparatus of claim 20, wherein at least part of the inlet extends diagonally, with respect to a horizontal top surface of the table, toward the table. ### Claim 30 (depends on 20) The apparatus of claim 20, wherein the liquid confinement structure has a bottom surface facing the table and an upper surface above the bottom surface of the optical element of the projection system, and wherein liquid from the inlet opening flows to contact the bottom surface of the optical element, then flows to below the bottom surface of the liquid confinement structure and flows toward the passage. ### Claim 31 (depends on 20) The apparatus of claim 20, wherein the inlet has a conduit extending from above the bottom surface of the optical element to the opening of the inlet. ### Claim 32 A lithographic projection apparatus comprising: a movable table; a projection system configured to project a patterned beam onto a target portion of a substrate; and a liquid supply system configured to at least partly fill a space between the projection system and the table with a liquid, the liquid supply system comprising: a liquid confinement structure extending along at least a part of the boundary of the space, the liquid confinement structure and the projection system configured to form a capillary passage, and an outlet configured to remove liquid from the space and to remove the liquid at the end of at least part of the capillary passage. ### Claim 33 (depends on 32) The apparatus according to claim 32, further comprising an inlet configured to provide liquid to the space and wherein the flow rate of the outlet is greater than the flow rate of the inlet. ### Claim 34 (depends on 32) The apparatus according to claim 32, further comprising an inlet configured to provide liquid to the space, an opening of the inlet being adjacent to an inner periphery of the liquid confinement structure and directed towards the target portion of the substrate. ### Claim 35 (depends on 32) The apparatus according to claim 32, further comprising an overflow region. ### Claim 36 (depends on 32) The apparatus according to claim 32, wherein the space covers a smaller area than the substrate. ### Claim 37 A lithographic projection apparatus, comprising; a movable table; a projection system configured to project a patterned beam of radiation onto a target portion of a substrate; a liquid supply system configured to at least partly fill a space between the projection system and the table with a liquid to form a liquid reservoir, the liquid supply system comprising an overflow region from the liquid reservoir and a liquid confinement structure extending along at least a part of the boundary of the space between the projection system and the table, the liquid confinement structure having a bottom surface facing the table and an upper surface above a surface, facing toward the table, of an optical element of the projection system; a passage between the optical element and at least part of the liquid confinement structure to allow movement of liquid to the overflow region; and a gas tight member to seal the space above the liquid in the passage, wherein the liquid confinement structure comprises an inlet to provide liquid having an opening that is located above the bottom surface, liquid from the inlet opening flowing to contact the surface of the optical element, flowing to below the bottom surface and flowing toward the passage and the liquid confinement structure is apart from and above the table. ### Claim 38 (depends on 37) The apparatus of claim 37, wherein the liquid confinement structure defines an open aperture through which the patterned beam is projected, the aperture being between the projection system and the table, and the liquid confinement structure further comprises an outlet, having an opening in a side of the liquid confinement structure that faces the table and below the inlet opening, to remove liquid from the space. ### Claim 39 (depends on 37) The apparatus of claim 37, wherein the liquid confinement structure defines an open aperture through which the patterned beam is projected, the aperture being between the projection system and the table, and the opening of the inlet is configured to provide liquid to the space above the aperture, the inlet opening adjacent to an inner periphery of the liquid confinement structure. ### Claim 40 (depends on 37) The apparatus of claim 37, wherein at least part of the inlet extends diagonally, with respect to a horizontal top surface of the table, toward the table and the opening is between the surface of the optical element and the table. ### Claim 41 A lithographic projection apparatus, comprising: a movable table; a projection system configured to project a patterned beam of radiation onto a target portion of a substrate; a liquid supply system configured to at least partly fill a space between the projection system and the table with a liquid to form a liquid reservoir, the liquid supply system comprising an overflow region from the liquid reservoir; and a barrier configured to bound the liquid, an entrance to the overflow region positioned on a side of the barrier opposite to a side of the barrier that faces the table, wherein the overflow region is arranged such that the liquid only flows into the overflow region when the liquid flows over the top of the barrier. ### Claim 42 (depends on 41) The apparatus of claim 41, wherein the barrier defines an open aperture through which the patterned beam is projected, the aperture being between the projection system and the table; and the barrier comprises an outlet, having an opening in a side of the liquid confinement structure that faces the table, to remove liquid from the space. ### Claim 43 (depends on 42) The apparatus of claim 42, further comprising an inlet to provide liquid to the space above the aperture, an opening of the inlet adjacent to an inner periphery of the barrier. ### Claim 44 (depends on 41) The apparatus of claim 41, wherein the barrier comprises an inlet to supply liquid to the space to contact a surface, facing toward the table, of an optical element of the projection system, at least part of the inlet extending diagonally, with respect to a horizontal top surface of the table, toward the table and the inlet having an opening between the surface of the optical element and the table. ### Claim 45 (depends on 41) The apparatus of claim 41, wherein the barrier has a bottom surface facing the table and an upper surface above a surface, facing toward the table, of an optical element of the projection system, the upper surface having an overflow opening of the overflow region; and further comprising: a passage between the optical element and at least part of the barrier to allow movement of liquid to the overflow opening, wherein the barrier comprises an inlet to provide liquid having an opening that is located above the bottom surface, liquid from the inlet opening flowing to contact the surface of the optical element, flowing to below the bottom surface and flowing toward the overflow opening. ### Claim 46 A lithographic projection apparatus, comprising: a movable table; a projection system configured to project a patterned beam of radiation onto a target portion of a substrate; a liquid supply system configured to at least partly fill a space between the projection system and the table with a liquid to form a liquid reservoir, the liquid supply system comprising an overflow region from the liquid reservoir; and a liquid confinement structure extending along at least a part of the boundary of the space between the projection system and the substrate, the liquid confinement structure and the projection system configured to form a passage, the overflow region arranged to remove liquid at the end of at least part of the passage. ### Claim 47 (depends on 46) The apparatus of claim 46, wherein the liquid confinement structure defines an open aperture through which the patterned beam is projected, the aperture being between the projection system and the table; and the liquid confinement structure comprises an outlet, having an opening in a side of the barrier that faces the table, to remove liquid from the space. ### Claim 48 (depends on 47) The apparatus of claim 47, further comprising an inlet to provide liquid to the space above the aperture, an opening of the inlet being adjacent to an inner periphery of the liquid confinement structure. ### Claim 49 (depends on 46) The apparatus of claim 46, wherein the liquid confinement structure comprises an inlet to supply liquid to the space to contact a surface, facing toward the table, of an optical element of the projection system, at least part of the inlet extending diagonally, with respect to a horizontal top surface of the table, toward the table and the inlet having an opening between the surface of the optical element and the table. ### Claim 50 (depends on 46) The apparatus of claim 46, wherein the liquid confinement structure has a bottom surface facing the table and an upper surface above a surface, facing toward the table, of an optical element of the projection system, the upper surface having an overflow opening of the overflow region, and the liquid confinement structure comprises an inlet to provide liquid having an opening that is located above the bottom surface, liquid from the inlet opening flowing to contact the surface of the optical element, flowing to below the bottom surface and flowing toward the overflow opening.