# US 8,542,030 B2 · Three-dimensional (3D) stacked integrated circuit testing > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,542,030 B2 - Document ID: US8542030B2 - Status: Granted - Kind: B2 - Application number: 12/942,662 - Filed: 2010-11-09 - Published: 2012-05-10 - Granted: 2013-09-24 - Earliest claimed: 2010-11-09 - Assignees: International Business Machines Corporation - Applicants: Chen-Yong Cher; Eren Kursun; Gary W. Maier; Raphael Peter Robertazzi - Inventors: Chen-Yong Cher; Eren Kursun; Gary W. Maier; Raphael Peter Robertazzi - Web page: https://patentgrep.com/patent/US8542030B2 ## CPC - G01R 31/2817: {Environmental-, stress-, or burn-in tests (of IC's G01R31/2855; of individual semiconductors G01R31/2642; of other circuits G01R31/2849)} - G01R 31/287: {Procedures; Software aspects} - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract Testing of a three-dimensional (3D) integrated circuit includes defining a first group of parts by a region and/or layer on the 3D integrated circuit. The testing further includes applying a first intensity of stress test conditions to the first group of parts. The testing also includes defining a second group of parts by a region and/or layer on the 3D integrated circuit that is different from the first group of parts. The testing further includes and applying a second intensity of stress test conditions to the second group of parts. The second intensity of stress test conditions is greater than the first intensity and is determined by sensitivities identified for each of the first and second group of parts. A determination is made whether the 3D integrated circuit passed the testing based upon results of application of the first and second intensities of stress test conditions. ## Claims ### Claim 1 A method of testing a three-dimensional (3D) integrated circuit, the method comprising: defining a first group of parts by at least one of a region and a layer on the 3D integrated circuit; applying a first intensity of stress test conditions to the first group of parts on the 3D integrated circuit; defining a second group of parts by at least one of a region and a layer on the 3D integrated circuit that is different from the region or layer of the first group of parts; applying a second intensity of stress test conditions to the second group of parts on the 3D integrated circuit, the second intensity of stress test conditions different from the first intensity of stress test conditions, the second intensity of stress test conditions determined by sensitivities identified for each of the first group of parts and the second group of parts; and determining whether the 3D integrated circuit passed the testing based upon results of application of the first and second intensities of stress test conditions. ### Claim 2 (depends on 1) The method of claim 1, wherein the 3D integrated circuit is a heterogeneous chip stack, and the first group of parts comprises components having a technology that is different from a technology employed by components comprised of the second group of parts. ### Claim 3 (depends on 2) The method of claim 2, wherein the first group of parts and the second group of parts are disposed on two different layers in the 3D integrated circuit, the method further comprising at least one of: using at least one of the layers and regions as a thermal buffer for at least one of another of the layers and regions, the thermal buffer mitigating effects of the stress test conditions during the testing; and using at least one of the layers and regions as a burn-in enhancer for at least one of another of the layers and regions, the burn-in enhancer boosting a temperature on the at least one of the layers and regions under test. ### Claim 4 (depends on 1) The method of claim 1, wherein the first group of parts is disposed adjacent to the second group of parts on a single layer of the 3D integrated circuit. ### Claim 5 (depends on 1) The method of claim 1, wherein the stress test conditions include temperature, voltage, and at least one of: duration of applied temperature, duration of applied voltage, frequency of applied temperature, and frequency of applied voltage. ### Claim 6 (depends on 1) The method of claim 1, wherein the first intensity of stress test conditions is applied simultaneously with the second intensity of stress test conditions. ### Claim 7 (depends on 1) The method of claim 1, further comprising: applying a third intensity of stress test conditions to a third group of parts on the 3D integrated circuit simultaneously with the applying of the second intensity of stress test conditions, the third intensity of stress test conditions equal to the second intensity of stress test conditions; wherein the second group of parts and the third group of parts are one of: disposed on two different layers in the 3D integrated circuit; and adjacent to each other on the a single layer of the 3D integrated circuit. ### Claim 8 (depends on 1) The method of claim 1, further comprising: selecting the intensities of stress test conditions to apply based on at least one of: design stages of the 3D integrated circuit, and earlier testing performing on the 3D integrated circuit. ### Claim 9 (depends on 8) The method of claim 8, wherein selecting the intensities of stress test conditions comprises: for each group of parts in the 3D integrated circuit: comparing stress test specifications to stress test sensitivity values of neighboring groups of parts on the 3D integrated circuit; and upon determining the stress test specifications exceed a sensitivity value of a neighboring group of parts on the 3D integrated circuit, selecting an intensity of the stress test conditions for the neighboring group of parts that is lower than an intensity of the stress test conditions for the group of parts under comparison. ### Claim 10 (depends on 1) The method of claim 1, wherein the testing is implemented by an on-chip controller with respect to the 3D integrated circuit. ### Claim 11 (depends on 1) The method of claim 1, wherein the testing is implemented by an off-chip controller with respect to the 3D integrated circuit. ### Claim 12 (depends on 1) The method of claim 1, wherein the testing is implemented by a combination of an on-chip controller and an off-chip controller with respect to the 3D integrated circuit. ### Claim 13 A system of testing a three-dimensional (3D) integrated circuit, the system comprising: a controller device in communication with the 3D integrated circuit, a voltage regulator, and a temperature actuator, the controller device including logic for implementing a method, the method comprising: defining a first group of parts by at least one of a region and a layer on the 3D integrated circuit; applying a first intensity of stress test conditions to the first group of parts on the 3D integrated circuit; defining a second group of parts by at least one of a region and a layer on the 3D integrated circuit that is different from the region or layer of the first group of parts; applying a second intensity of stress test conditions to the second group of parts on the 3D integrated circuit, the second intensity of stress test conditions different from the first intensity of stress test conditions, the second intensity of stress test conditions determined by sensitivities identified for each of the first group of parts and the second group of parts; and determining whether the 3D integrated circuit passed the testing based upon results of application of the first and second intensities of stress test conditions. ### Claim 14 (depends on 13) The system of claim 13, wherein the 3D integrated circuit is a heterogeneous chip stack, and the first group of parts comprises components having a technology that is different from a technology employed by components comprised of the second group of parts. ### Claim 15 (depends on 14) The system of claim 14, wherein the first group of parts and the second group of parts are disposed on two different layers in the 3D integrated circuit, the method further comprising at least one of: using at least one of the layers and regions as a thermal buffer for at least one of another of the layers and regions, the thermal buffer mitigating effects of the stress test conditions during the testing; and using at least one of the layers and regions as a burn-in enhancer for at least one of another of the layers and regions, the burn-in enhancer boosting a temperature on the at least one of the layers and regions under test. ### Claim 16 (depends on 14) The system of claim 14, wherein the first group of parts is disposed adjacent to the second group of parts on a single layer of the 3D integrated circuit. ### Claim 17 (depends on 14) The system of claim 14, wherein the stress test conditions include temperature, voltage, and at least one of: duration of applied temperature, duration of applied voltage, frequency of applied temperature, and frequency of applied voltage. ### Claim 18 (depends on 14) The system of claim 14, wherein the first intensity of stress test conditions is applied simultaneously with the second intensity of stress test conditions. ### Claim 19 (depends on 14) The system of claim 14, wherein the method further comprises: applying a third intensity of stress test conditions to a third group of parts on the 3D integrated circuit simultaneously with the applying of the second intensity of stress test conditions, the third intensity of stress test conditions equal to the second intensity of stress test conditions; wherein the second group of parts and the third group of parts are one of: disposed on two different layers in the 3D integrated circuit; and adjacent to each other on the a single layer of the 3D integrated circuit. ### Claim 20 (depends on 14) The system of claim 14, wherein the method further comprises: selecting the intensities of stress test conditions to apply based on at least one of: design stages of the 3D integrated circuit, and earlier testing performing on the 3D integrated circuit. ### Claim 21 (depends on 20) The system of claim 20, wherein selecting the intensities of stress test conditions comprises: for each group of parts in the 3D integrated circuit: comparing stress test specifications to stress test sensitivity values of neighboring groups of parts on the 3D integrated circuit; and upon determining the stress test specifications exceed a sensitivity value of a neighboring group of parts on the 3D integrated circuit, selecting an intensity of the stress test conditions for the neighboring group of parts that is lower than an intensity of the stress test conditions for the group of parts under comparison. ### Claim 22 (depends on 14) The system of claim 14, wherein the controller device is implemented as an on-chip controller with respect to the 3D integrated circuit. ### Claim 23 (depends on 14) The system of claim 14, wherein the controller device is implemented as an off-chip controller with respect to the 3D integrated circuit. ### Claim 24 (depends on 14) The system of claim 14, wherein the controller device is implemented as a combination of an on-chip controller and an off-chip controller with respect to the 3D integrated circuit. ### Claim 25 (depends on 14) The system of claim 14, wherein the temperature actuator is at least one of [a]n: logic based temperature actuator; a wire-based temperature actuator; and liquid cooling channels.