# US 8,542,027 B2 · Probe card

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- Number: US 8,542,027 B2
- Document ID: US8542027B2
- Status: Granted
- Kind: B2
- Application number: 12/725,909
- Filed: 2010-03-17
- Published: 2010-09-23
- Granted: 2013-09-24
- Earliest claimed: 2009-03-18
- Assignees: Mpi Corporation
- Applicants: Young-Huang Chou; Wei-Cheng Ku; Wen-Pin Su; Jun-Liang Lai; Chao-Ping Hsieh; Ping-Hsiao Liao
- Inventors: Young-Huang Chou; Wei-Cheng Ku; Wen-Pin Su; Jun-Liang Lai; Chao-Ping Hsieh; Ping-Hsiao Liao
- Web page: https://patentgrep.com/patent/US8542027B2

## CPC

- G01R 31/31905: {Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture}
- G01R 31/31926: {Routing signals to or from the device under test [DUT], e.g. switch matrix, pin multiplexing}
- G01R 31/31928: {Formatter (driver, receiver details G01R31/31924)}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

A probe card is provided. The probe card can serialize, analogize and divide a digital signal by a analog-to-digital converter (ADC), a digital-to-analog converter (DAC), and a power divided unit respectively. The probe card can increase signal channels, and is not restricted by signal channels of a tester to test more DUTs simultaneously. Moreover, the probe card has fine impedance matching and channels separating to raise testing efficiency and reduce signal loss.

## Claims

### Claim 1

A probe card for connecting a tester and a device under test, comprising:
a first converter connected to the tester to serialize a signal from the tester into a serial signal;
a modulator connected to the first converter to convert the serial signal from the first converter into an analog serial signal;
a power divided unit connected to the modulator to divide the analog serial signal into a plurality of analog serial signals and transmit the analog serial signals to signal channels respectively;
a demodulator connected to the signal channels to convert the analog serial signals from the signal channels into a digital serial signal; and
a second converter connecting the demodulator and the device under test to convert the digital serial signal from the demodulator into a digital parallel signal and transmit the digital parallel signal to the device under test.

### Claim 2 (depends on 1)

The probe card as defined in claim 1, wherein the signal channels are selected from the group consisting of transmission lines, a pattern on a printed circuit board, and signal wires.

### Claim 3 (depends on 1)

The probe card as defined in claim 1, wherein the power divided unit is selected from the group consisting of a power divider, a switch, and a capacitor.

### Claim 4 (depends on 1)

The probe card as defined in claim 1, further comprising a buffer connected to the second converter to avoid interference during signal transmission.

### Claim 5 (depends on 1)

The probe card as defined in claim 1, further comprising a register connected to the second converter to synchronously output the digital signal from the second converter.

### Claim 6 (depends on 5)

The probe card as defined in claim 5, further comprising a comparator between the second converter and the register to compare the digital parallel signal from the second converter with a testing signal from the device under test.

### Claim 7

A probe card for connecting a tester and a device under test, comprising:
a modulator connected to the tester to convert a signal from the tester into an analog signal;
a power divided unit connected to the modulator to divide the analog signal into a plurality of analog signals and transmit the analog signals to signal channels respectively; and
a demodulator connecting the signal channels and the device under test to convert the analog signals from the signal channels into a digital signal and transmit the digital signal to the device under test.

### Claim 8 (depends on 7)

The probe card as defined in claim 7, wherein the signal channels are selected from the group consisting of transmission lines, a pattern on a printed circuit board, and signal wires.

### Claim 9 (depends on 7)

The probe card as defined in claim 7, wherein the power divided unit is selected from the group consisting of a power divider, a switch, and a capacitor.

### Claim 10 (depends on 7)

The probe card as defined in claim 7, further comprising a buffer connected to the demodulator to avoid interference during signal transmission.

### Claim 11 (depends on 7)

The probe card as defined in claim 7, further comprising a register connected to the demodulator to synchronously output the digital signal from the second converter.

### Claim 12 (depends on 11)

The probe card as defined in claim 11, further comprising a comparator connected to the register and the device under test to compare the signal transmitted to the device under test with a testing signal from the device under test.

### Claim 13

A probe card, comprising:
a tester terminal; and
a device under test terminal, wherein the tester terminal is connected to a tester to modulate a digital signal into a modulated analog signal, and the device under test terminal is connected to a device under test to demodulate the modulated analog signal from the tester terminal into a demodulated digital signal;
where said modulated digital signal is sent to said device under test; and
where said probe card further comprises a first converter in the tester terminal to serialize the digital signal from the tester into a serial signal and a second converter in the device under test terminal to convert the demodulated digital signal into a digital parallel signal.

### Claim 14

A probe card, comprising:
a tester terminal; and
a device under test terminal, wherein the tester terminal is connected to a tester to modulate a digital signal into a modulated analog signal, and the device under test terminal is connected to a device under test to demodulate the modulated analog signal from the tester terminal into a demodulated digital signal;
where said modulated digital signal is sent to said device under test; and
where said probe card further comprises a power divided unit connecting the tester terminal and the device under test terminal to divide and transmit the analog signal from the tester terminal to the device under test terminal.
