# US 8,541,929 B2 · Piezoelectric devices and methods for manufacturing same

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- Number: US 8,541,929 B2
- Document ID: US8541929B2
- Status: Granted
- Kind: B2
- Application number: 12/590,998
- Filed: 2009-11-17
- Published: 2010-05-20
- Granted: 2013-09-24
- Earliest claimed: 2008-11-17
- Assignees: Nihon Dempa Kogyo Co., Ltd.
- Applicants: Kozo Ono; Takehiro Takahashi
- Inventors: Kozo Ono; Takehiro Takahashi
- Web page: https://patentgrep.com/patent/US8541929B2

## CPC

- H03H 9/0519: {for cantilever (H03H9/1021 takes precedence)}
- H03H 9/1021: {the BAW device being of the cantilever type}
- Y10T 29/42: Piezoelectric device making
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

Piezoelectric devices and method for making them are disclosed. An exemplary piezoelectric device has a package base defining a cavity on a first surface thereof. An opposing second surface of the package base has at least one through-hole, a mounting electrode on which a piezoelectric vibrating piece is attached, and a respective sealing electrode sealing each through-hole. At least one external electrode is on the second surface, and a lid is bonded to the package base to enclose the piezoelectric vibrating piece. The mounting electrode, sealing electrodes, and external electrodes are formed integrally.

## Claims

### Claim 1

A piezoelectric device, comprising:
a piezoelectric vibrating piece;
a package containing the piezoelectric vibrating piece,
the package comprising (a) a package base comprised of glass, having first and second opposing surfaces, a cavity defined on the first surface, and at least one through-hole on the second surface, (b) at least one mounting electrode, formed having a hemispherical shape, wherein an electrically conductive adhesive is applied on the surface of the at least one mounting electrode to achieve bonding thereto of a respective connecting electrode of the piezoelectric vibrating piece, (c) a respective sealing electrode, formed having a conical shape, that electrically connects to the at least one mounting electrode and seals the through-hole, (d) at least one external electrode situated on the second surface and electrically connected to the respective sealing electrode, and (e) a package lid comprising glass or silicon, bonded to the package base,
wherein the at least one mounting electrode, the at least one sealing electrode, and the at least one external electrode are integral with each other by a conductive glass paste having resistance to a temperature higher than a temperature at which the package lid is bonded to the package base, the conductive glass paste and package base having substantially equal respective coefficients of thermal expansion.

### Claim 2 (depends on 1)

The device of claim 1, wherein:
the package base is comprised of borosilicate glass;
the package lid further comprises a metal film thereon; and
the package base and the package lid are bonded together by anodic bonding.

### Claim 3 (depends on 1)

The device of claim 1, wherein the package base and the package lid are bonded together by epoxy resin.

### Claim 4 (depends on 1)

The device of claim 1, wherein the package base and the lid are bonded together by a low-melting-point glass.