# US 8,541,911 B2 · Magnetic actor and a method for its installation

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- Number: US 8,541,911 B2
- Document ID: US8541911B2
- Status: Granted
- Kind: B2
- Application number: 12/959,457
- Filed: 2010-12-03
- Published: 2011-07-14
- Granted: 2013-09-24
- Earliest claimed: 2010-01-13
- Assignees: Integrated Dynamics Engineering GmbH
- Applicants: Arndt Evers; Ralf Tillmann
- Inventors: Arndt Evers; Ralf Tillmann
- Web page: https://patentgrep.com/patent/US8541911B2

## CPC

- H01F 7/066: {Electromagnets with movable winding}
- F16F 15/023: using fluid means
- F16F 15/03: using {magnetic or} electromagnetic means (F16F9/53, {F16F15/005} take precedence)
- H01F 7/0221: {Mounting means for PM, supporting, coating, encapsulating PM}
- H01F 7/127: Assembling
- Y10T 29/49009: Dynamoelectric machine
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- F16F: SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

The invention relates to a magnetic actor in which the permanent magnets are arranged in a Halbach configuration and inserted into a slide-in frame.

## Claims

### Claim 1

A magnetic actor comprising:
two lateral parts that are arranged opposite each other with permanent magnets, wherein each lateral part comprises at least two permanent magnets in a Halbach configuration; and
a coil that is arranged between the two lateral parts in such a way that the coil is movable relative to the two lateral parts, wherein a force is generated between the two lateral parts when the coil is triggered, and wherein the permanent magnets are held inside a slide-in frame that is open only on one side for insertion of a magnet and that avoids the magnets becoming distorted during a slide-in action; and
wherein the insertion height of the slide-in frame is smaller than the diagonal of the permanent magnets in a plane that extends in the direction of the insertion.

### Claim 2 (depends on 1)

The magnetic actor as claimed in claim 1 wherein each of the two lateral parts comprises at least three permanent magnets that are disposed in a Halbach configuration.

### Claim 3 (depends on 1)

The magnetic actor as claimed in claim 1 wherein each of the two lateral parts comprises at least two rows of magnets that are disposed in a Halbach configuration adjacent to each other.

### Claim 4 (depends on 3)

The magnetic actor as claimed in claim 3 wherein the slide-in frame comprises a bar that is disposed between the rows.

### Claim 5 (depends on 1)

The magnetic actor as claimed in claim 1 wherein the two lateral parts are connected with a plate respectively at two sides that are opposite each other.

### Claim 6 (depends on 1)

The magnetic actor as claimed in claim 1 wherein the lateral parts comprise an immobilization plate that is connected with the slide-in frame.

### Claim 7 (depends on 6)

The magnetic actor as claimed in claim 6 wherein the immobilization plate comprises clamping means for clamping the permanent magnets in place.

### Claim 8 (depends on 6)

The magnetic actor as claimed in claim 6 wherein the immobilization plate comprises screws for clamping the permanent magnets in place.

### Claim 9 (depends on 1)

The magnetic actor as claimed in claim 1 wherein the slide-in frame comprises clamping means for clamping the permanent magnets in place.

### Claim 10 (depends on 1)

The magnetic actor as claimed in claim 1 wherein the slide-in frame comprises adjusting means for positioning the slide-in frame.

### Claim 11 (depends on 1)

A vibration isolation system for vibration-isolated support of a lithography or wafer inspection device, comprising:
at least one bearing that is effective at least in a vertical and/or horizontal direction; and
a magnetic actor as claimed in claim 1 that can be triggered for active vibration isolation.

### Claim 12 (depends on 11)

The vibration isolation system as claimed in claim 11 characterized in that the coil is fastened on a vibration-isolated side of the vibration isolation system.

### Claim 13 (depends on 1)

The magnetic actor as claimed in claim 1 wherein each of the two lateral parts comprises five permanent magnets that are disposed in a Halbach configuration.

### Claim 14 (depends on 1)

The magnetic actor as claimed in claim 1 wherein the slide-in frame comprises screws for clamping the permanent magnets in place.

### Claim 15 (depends on 1)

The magnetic actor as claimed in claim 1 wherein the slide-in frame comprises bore holes for an adjustment pin, for positioning the slide-in frame.