# US 8,541,910 B1 · MEMS microgenerator cell and microgenerator cell array > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,541,910 B1 - Document ID: US8541910B1 - Status: Granted - Kind: B1 - Application number: 11/162,697 - Filed: 2005-09-20 - Granted: 2013-09-24 - Earliest claimed: 2003-03-20 - Assignees: University of South Florida - Applicants: Shekhar Bhansali; Rajsekhar Popuri - Inventors: Shekhar Bhansali; Rajsekhar Popuri - Web page: https://patentgrep.com/patent/US8541910B1 ## CPC - H02K 44/08: Magnetohydrodynamic [MHD] generators - H02N 3/00: Generators in which thermal or kinetic energy is converted into electrical energy by ionisation of a fluid and removal of the charge therefrom (discharge tubes functioning as thermionic generators H01J45/00) - H02K: DYNAMO-ELECTRIC MACHINES (dynamo-electric relays H01H53/00; conversion of DC or AC input power into surge output power {H03K3/53}) - H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ## Abstract A microelectrical mechanical system (MEMS) microgenerator cell and array is disclosed. The MEMS microgenerator cell of the present invention is effective in the conversion of thermal energy to electrical energy. In accordance with the present invention, an explosive material is loaded into a chamber. A diaphragm seals the chamber, containing a plasma material. The explosive material is subsequently heated to its ignition temperature thereby raising the pressure in the chamber until the diaphragm ruptures. The rupture of the diaphragm results in the flow of plasma out of the chamber. Upon exiting the chamber, the plasma is forced to flow between two parallel rectangular electrodes. A magnetic field is applied in a direction orthogonal to both the plasma flow and the electrodes, thereby generating an electromagnetic field sufficient to a power source for MEMS devices. ## Claims ### Claim 1 A microgenerator cell comprising: a microchamber having a first cavity and a second cavity; an explosive igniter at least partially suspended within the first cavity; a diaphragm positioned between the first cavity and the second cavity, the diaphragm cooperatively dimensioned with the igniter to rupture upon the explosion of the explosive igniter; a propellant disposed in the second cavity, the propellant selected to expand rapidly in response to the igniter exploding through the ruptured diaphragm; two electrodes positioned at a distal end of the second cavity, the electrodes cooperatively dimensioned with the second cavity such that the propellant flows between the two electrodes upon expansion; and two magnets of opposite polarity, the magnets cooperatively dimensioned and positioned to establish a magnetic field orthogonal to the direction of propellant flow through the electrodes and orthogonal to the electrodes. ### Claim 2 (depends on 1) The microgenerator cell of claim 1, wherein the microchamber is disposed on a substantially planar silicon substrate. ### Claim 3 (depends on 2) The microgenerator cell of claim 2, wherein the microchamber is disposed on the substantially planar silicon substrate using deep reactive ion etching. ### Claim 4 (depends on 1) The microgenerator cell of claim 1, wherein the explosive igniter further comprises: an explosive material positioned within the first cavity; and a resistive heater positioned adjacent to the explosive material, the resistor separated from the explosive material by an insulating layer. ### Claim 5 (depends on 4) The microgenerator cell of claim 4, wherein the explosive material is lead styphnate. ### Claim 6 (depends on 4) The microgenerator cell of claim 4, wherein the resistive heater is a poly-silicon micro-resistor. ### Claim 7 (depends on 1) The microgenerator cell of claim 1, wherein the propellant is a gas having high electrical conductivity. ### Claim 8 (depends on 1) The microgenerator cell of claim 1, wherein the propellant is plasma. ### Claim 9 (depends on 1) The microgenerator cell of claim 1, wherein the propellant is plasma seeded with an alkali metal. ### Claim 10 (depends on 1) The microgenerator cell of claim 1, wherein the electrodes are parallel plate electrodes. ### Claim 11 (depends on 1) The microgenerator cell of claim 1, further comprising a load in circuit communication with the electrodes. ### Claim 12 (depends on 1) The microgenerator cell of claim 1, wherein the magnets are permanent magnets. ### Claim 13 A microgenerator comprising a plurality of microgenerator cells, wherein each of the microgenerator cells comprise: a chamber having a first cavity and a second cavity; an explosive igniter at least partially suspended within the first cavity; a diaphragm positioned between the first cavity and the second cavity, the diaphragm cooperatively dimensioned with the igniter to rupture upon the explosion of the explosive igniter; a plasma disposed in the second cavity, the plasma selected to expand rapidly in response to the igniter exploding through the ruptured diaphragm; two parallel plate electrodes positioned at a distal end of the second cavity, the electrodes cooperatively dimensioned with the second cavity such that the plasma flows between the electrodes upon expansion; and two magnets of opposite polarity, the magnets cooperatively dimensioned and positioned to establish a magnetic field orthogonal to the direction of plasma flow through the electrodes. ### Claim 14 (depends on 13) The microgenerator cell array of claim 13, wherein the explosive igniters are individually selectable and ignitable. ### Claim 15 (depends on 4) The microgenerator cell of claim 4, wherein the explosive material is selected from the group consisting of a primary single charge explosive and a multicharge explosive material triggered by a primary explosive. ### Claim 16 (depends on 15) The microgenerator cell of claim 15, wherein the explosive material is lead styphnate. ### Claim 17 (depends on 4) The microgenerator cell of claim 4, wherein the resistive heater is microfabricated of integrated at a wafer level. ### Claim 18 (depends on 1) The microgenerator cell of claim 1, wherein the propellant is plasma seeded with an alkali metal to significantly enhance the efficiency of the cell. ### Claim 19 (depends on 17) The microgenerator cell of claim 17, wherein the igniter is constructed from poly-silicon. ### Claim 20 (depends on 1) The microgenerator cell of claim 1, wherein the cell is one of a plurality of microgenerator cells, wherein the explosive igniters of each of the plurality of cells are individually selectable and ignitable.